Dr. Tung Yu Wu Profile

Dr. Tung Yu Wu

at Winbond Electronics Corp

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Author

Publications (3)

Proceedings Article | 28 April 2023 Paper

Constructing layout hierarchy for high-efficiency OPC flow

Tsung-Wei Lin, Hung-Yu Lin, Mang-Shiun Chiang, Shi-Cheng Yeh, Jason Sweis, Philippe Hurat, Tung-Yu Wu, Chun-Sheng Wu, Chao-Yi Huang, Ya-Chieh Lai

Proceedings Volume 12495, 124951N (2023) https://doi.org/10.1117/12.2657649

KEYWORDS: Optical proximity correction, Design and modelling, Lithography, Manufacturing, Electronic design automation, Resolution enhancement technologies, Optics manufacturing, Image segmentation

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Proceedings Article | 13 June 2022 Presentation + Paper

Pareto front optimization for enhanced model prediction accuracy

David Fryer, Ignat Moskalenko, Tung-Yu Wu, Meng-Shiun Chiang, Chun Yen Liao, Tsung-Wei Lin, Chun-Sheng Wu, Chao-Yi Huang, Luke Lo, Xiang Fang, Germain Fenger, Farruh Shahidi

Proceedings Volume 12052, 120520Q (2022) https://doi.org/10.1117/12.2614118

KEYWORDS: Optimization (mathematics), Calibration, Data modeling, Optical proximity correction, Binary data, Performance modeling, Genetic algorithms, Process modeling, Computer simulations, Precision calibration

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Proceedings Article | 20 March 2020 Paper

A strengthen mask r-CNN method for PFA image measurement

Tung-Yu Wu, Chun Yen Liao, Chun-Hung Lin, Kao-Tsai Tsai, Jun-Sheng Wu, Chao-Yi Huang

Proceedings Volume 11325, 113252G (2020) https://doi.org/10.1117/12.2551686

KEYWORDS: Image processing, Image analysis, Critical dimension metrology, Convolution, Neural networks, Data modeling, Semiconducting wafers

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