Dr. Vadim Sidorkin Profile

Dr. Vadim Sidorkin

Lead Nanofabrication Engineer at Microsoft Corporation

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Publications (3)

Proceedings Article | 26 March 2019 Presentation + Paper

Towards ultimate image placement accuracy for EUV mask writing with pattern shift process

Vadim Sidorkin, Stephan Zimmermann, Stefan Proske, Michael Finken, G. Cantrell, Markus Bender

Proceedings Volume 10957, 109570K (2019) https://doi.org/10.1117/12.2513666

KEYWORDS: Extreme ultraviolet, Photomasks, Metrology, Electron beam lithography, Reticles

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Proceedings Article | 8 October 2014 Paper

Resist charging effect correction function qualification for photomasks production

Vadim Sidorkin, Michael Finken, Timo Wandel, Noriaki Nakayamada, G. Cantrell

Proceedings Volume 9235, 92350Z (2014) https://doi.org/10.1117/12.2066126

KEYWORDS: Photomasks, Metals, Calibration, Reticles, Electron beam lithography, Overlay metrology, Performance modeling, Data modeling, Instrument modeling, Visualization

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Proceedings Article | 2 April 2010 Paper

Nanofabrication with a helium ion microscope

Diederik Maas, Emile van Veldhoven, Ping Chen, Vadim Sidorkin, Huub Salemink, Emile van der Drift, Paul Alkemade

Proceedings Volume 7638, 763814 (2010) https://doi.org/10.1117/12.862438

KEYWORDS: Helium, Ions, Nanofabrication, Ion beams, Scanning helium ion microscopy, Electron beam lithography, Ion beam lithography, Polymers, Inspection, Nanolithography

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