Prof. Vladimir Sergeevich Pavelyev Profile

Prof. Vladimir Sergeevich Pavelyev

Senior Researcher at Image Processing Systems Institute RAS

SPIE Involvement:

Author

Publications (39)

Proceedings Article | 26 November 2023 Paper

Combined high-power terahertz vortex Bessel beams: formation and identification

N. Osintseva, V. Gerasimov, Yu. Choporova, V. Kukotenko, V. Pavelyev, B. Knyazev

Proceedings Volume 12776, 127760J (2023) https://doi.org/10.1117/12.2687532

KEYWORDS: Bessel beams, Terahertz radiation, Optical filters, Axicons, Multiplexing, Free electron lasers, Wavefronts, Spiral phase plates

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Proceedings Article | 30 December 2016 Paper

Anchored multi-DOF MEMS gyroscope having robust drive mode

Payal Verma, S. Khonina, V. Pavelyev, S. Fomchenkov, B. Uma

Proceedings Volume 10224, 102241D (2016) https://doi.org/10.1117/12.2267115

KEYWORDS: Microelectromechanical systems, Gyroscopes, Oscillators, Capacitance, Differential equations, Electronics, Communication engineering, Dynamical systems, Systems modeling, Consumer electronics

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Proceedings Article | 14 May 2010 Paper

Stochastic optimization of radial DOE forming intensity distribution along an axial focal zone

D. Kachalov, V. Pavelyev, S. Khonina, R. Skidanov, O. Yu. Moiseev

Proceedings Volume 7717, 77170E (2010) https://doi.org/10.1117/12.854870

KEYWORDS: Diffractive optical elements, Binary data, Stochastic processes, Optical components, Axicons, Genetics, Genetic algorithms, Optical design, Diffraction, Quantization

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Proceedings Article | 14 May 2010 Paper

Fabrication of three-dimensional metallodielectric photonic crystals by interference lithography

P. Dyachenko, S. Karpeev, E. Fesik, Yu. Miklyaev, V. Pavelyev, G. Malchikov

Proceedings Volume 7713, 77131J (2010) https://doi.org/10.1117/12.853791

KEYWORDS: Photonic crystals, Photoresist materials, Lithography, Gold, Nanoparticles, Absorption, Coating, Holography, Helium cadmium lasers, Metals

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Proceedings Article | 13 May 2010 Paper

Novel approach for manufacturing of continuously shaped diffractive optical elements

Vladimir Pavelyev, Yuri Miklyaev, Waleri Imgrunt, Maxim Bolshakov, Denis Kachalov, Victor Soifer, Lutz Aschke, Vitaly Lissotschenko

Proceedings Volume 7716, 77161N (2010) https://doi.org/10.1117/12.854836

KEYWORDS: Beam splitters, Diffractive optical elements, Optics manufacturing, Lithographic illumination, Optical design, Diffraction gratings, Optical components, Manufacturing, Micro optics, Lithography

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Optical lithography with its 193nm technology is pushed to reach and shift its limits even further. There is strong demand on innovations in illumination part of exposure tools. Current illumination systems consisting of diffractive and refractive optical elements offer numerous benefits such as optimized laser beam shape with high homogeneity and high numerical aperture enabling high efficiency. LIMO's unique production technology is capable to manufacture free form surfaces on monolithic arrays larger than 250mm with high precision and reproducibility. Different kinds of intensity distributions with best uniformities or customized profiles have been achieved by using LIMO's refractive optical elements. Recently LIMO pushed the limits of this lens production technology and was able to manufacture first diffractive optical elements (DOE) based on continuous relief's profile. Beside for the illumination devices in lithography, DOEs find wide use in optical devices for other technological applications, such as optical communications and data processing. Up to now DOE designs follow the principle of phase diffraction gratings. Its diffraction structure with a periodic phase profile performs a superposition of beams with predefined energy ratios. Due to the application for high precise laser-beam shaping and beam splitting in optical technologies and optical fiber networks, number of grating orders is increased up to some tens or even hundreds. Classic lithographic technologies lead to quantized (step-like) profiles of diffractive micro-reliefs, which causes a decrease of beam splitter's diffractive efficiency. The newest development of LIMO's microlens fabrication technology allows us to make a step from free programmable microlens profiles to diffractive optical elements with high efficiency. Our first results of this approach are demonstrated in this paper. Diffractive beam splitters are presented. A special mathematical method is used to design diffractive optical elements with continuous surface profiles. Comparison between theoretical simulations and experimental results shows very good correlation.

Proceedings Article | 4 March 2010 Paper

Novel continuously shaped diffractive optical elements enable high efficiency beam shaping

Yuri Miklyaev, Waleri Imgrunt, Vladimir Pavelyev, Denis Kachalov, Tanja Bizjak, Lutz Aschke, Vitalij Lissotschenko

Proceedings Volume 7640, 764024 (2010) https://doi.org/10.1117/12.846573

KEYWORDS: Beam splitters, Diffractive optical elements, Manufacturing, Beam shaping, Optics manufacturing, Optical components, Lithographic illumination, Micro optics, Diffraction gratings, Lithography

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Proceedings Article | 25 April 2008 Paper

Realization and investigaton of diffractive microrelief on the end face of silver-halide waveguide

V. Pavelyev, O. Yu. Moiseev, A. Volkov, V. Eropolov, S. Dmitriev, S. Karpeev, V. Artyushenko, V. Kashin

Proceedings Volume 6994, 69940Q (2008) https://doi.org/10.1117/12.780695

KEYWORDS: Antireflective coatings, Optical fibers, Waveguides, Fabrication, Silver, Diffraction gratings, Etching, Optical lithography, Beam splitters, Binary data

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Proceedings Article | 21 April 2008 Paper

Complete photonic band gap in icosahedral quasicrystals with a body-centered six-dimensional lattice

P. Dyachenko, V. Dmitrienko, Yu Miklyaev, V. Pavelyev

Proceedings Volume 6989, 69891T (2008) https://doi.org/10.1117/12.780760

KEYWORDS: Dielectrics, Chemical species, Photonic crystals, Optical spheres, Crystals, Diamond, Photons, Microwave radiation, Silicon, Image processing

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Proceedings Article | 10 April 2007 Paper

Selective excitation of step-index fiber modes

Andrey Gavrilov, Sergey Karpeev, Nikolay Kazanskiy, Vladimir Pavelyev, Michael Duparré, Barbara Luedge, S. Schroeter

Proceedings Volume 6605, 660508 (2007) https://doi.org/10.1117/12.728461

KEYWORDS: Binary data, Optical fibers, Step index fibers, Fiber lasers, Diffractive optical elements, Optical communications, Computer simulations, CCD cameras, Cameras, Optical filters

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Proceedings Article | 9 September 2006 Paper

High-effective excitation of graded-index waveguide mode by use of diffractive microrelief on waveguide surface

V. Pavelyev

Proceedings Volume 6290, 629007 (2006) https://doi.org/10.1117/12.682549

KEYWORDS: Diffractive optical elements, Waveguides, Gaussian beams, Waveguide modes, Computer simulations, Digital holography, Optical components, Refractive index, Free space, Binary data

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Proceedings Article | 31 August 2006 Paper

Synthesis and investigation of diamond diffractive optical elements

V. Pavelyev, V. Soifer, N. Kazanskiy, D. Golovashkin, A. Volkov, G. Kostyuk, V. Kononenko, V. Konov, S. Pimenov, M. Komlenok, M. Duparré, B. Luedge

Proceedings Volume 6290, 62900B (2006) https://doi.org/10.1117/12.682129

KEYWORDS: Diamond, Etching, Laser ablation, Diffractive optical elements, Gas lasers, Niobium, Carbon monoxide, Chemical vapor deposition, Optical components, Thermography

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Proceedings Article | 9 June 2006 Paper

Formation of diffractive microrelief on diamond film surface for IR laser beam control

A. Volkov, S. Borodin, Gennadiy Kostyuk, Vladimir Pavelyev

Proceedings Volume 6251, 62510Y (2006) https://doi.org/10.1117/12.677727

KEYWORDS: Diamond, Etching, Plasma etching, Niobium, Photoresist materials, Optical components, Plasma, Ions, Carbon dioxide lasers, Antireflective coatings

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Proceedings Article | 25 April 2006 Paper

On-fiber diffractive microrelief design for efficient control of the waveguiding beam

V. Pavelyev

Proceedings Volume 6187, 61870S (2006) https://doi.org/10.1117/12.663844

KEYWORDS: Diffractive optical elements, Waveguides, Gaussian beams, Waveguide modes, Computer simulations, Digital holography, Binary data, Optical components, Wave propagation, Laser beam propagation

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Proceedings Article | 20 October 2005 Paper

Synthesis of diamond diffractive optical elements for IR laser beam focusing

V. Pavelyev, V. Soifer, N. Kazanskiy, A. Volkov, G. Kostyuk, V. Kononenko, V. Konov, S. Pimenov, M. Komlenok, M. Duparré, B. Luedge, M. Berger

Proceedings Volume 5965, 59650M (2005) https://doi.org/10.1117/12.623753

KEYWORDS: Diamond, Etching, Laser ablation, Diffractive optical elements, Gas lasers, Niobium, Carbon monoxide, Chemical vapor deposition, Optical components, Thermography

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Proceedings Article | 15 October 2005 Paper

Design of diffractive optical micro-relief for waveguided beam focusing

V. Pavelyev

Proceedings Volume 5962, 59622Z (2005) https://doi.org/10.1117/12.625004

KEYWORDS: Waveguides, Diffractive optical elements, Waveguide modes, Gaussian beams, Optical design, Computer simulations, Optical components, Wave propagation, Digital holography, Laser beam propagation

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Proceedings Article | 15 October 2005 Paper

Technology-oriented stochastic optimization of radially symmetric DOEs

V. Pavelyev

Proceedings Volume 5962, 596230 (2005) https://doi.org/10.1117/12.625005

KEYWORDS: Diffractive optical elements, Stochastic processes, Quantization, Optimization (mathematics), Inverse problems, Gaussian beams, Numerical simulations, Genetics, Diffraction, Energy efficiency

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Proceedings Article | 6 June 2005 Paper

Transverse mode multiplexing by diffractive optical elements

Sergey Karpeev, Vladimir Pavelyev, Victor Soifer, Svetlana Khonina, Michael Duparre, Barbara Luedge, Jari Turunen

Proceedings Volume 5854, (2005) https://doi.org/10.1117/12.634547

KEYWORDS: Diffractive optical elements, Multiplexing, Telecommunications, Spiral phase plates, Diffraction, Binary data, Optical fibers, Optical vortices, Optical components, Optical communications

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Proceedings Article | 6 June 2005 Paper

High-effective fiber sensors based on transversal mode selection

Sergey Karpeev, Vladimir Pavelyev, Svetlana Khonina, Nikolay Kazanskiy

Proceedings Volume 5854, (2005) https://doi.org/10.1117/12.634603

KEYWORDS: Diffraction, Fiber optics sensors, Diffractive optical elements, Sensors, Image filtering, Data processing, Optical filters, Fiber couplers, Refractive index, CCD cameras

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Proceedings Article | 1 September 2004 Paper

Diffractive microrelief design for waveguiding beam control

Vladimir Pavelyev, S. Karpeev, Victor Soifer, Michael Duparre, Barbara Luedge

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.553663

KEYWORDS: Diffractive optical elements, Waveguides, Waveguide modes, Free space, Beam controllers, Optical fibers, Light wave propagation, Holograms, Radio propagation, Geometrical optics

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Proceedings Article | 1 September 2004 Paper

Diamond diffractive optical elements for infrared laser beam control

Vladimir Pavelyev, Victor Soifer, Dimitriy Golovashkin, Vitaliy Kononenko, Vitali Konov, Sergej Pimenov, Michael Duparre, Barbara Luedge

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.553637

KEYWORDS: Diamond, Diffractive optical elements, Gas lasers, Laser ablation, Chemical vapor deposition, Carbon monoxide, Optics manufacturing, Computer simulations, Diffraction, Quantization

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Proceedings Article | 3 May 2004 Paper

Mode multiplexing by diffractive optical elements in optical telecommunication

S. Karpeev, Vladimir Pavelyev, Victor Soifer, Leonid Doskolovich, Michael Duparre, Barbara Luedge

Proceedings Volume 5480, (2004) https://doi.org/10.1117/12.558775

KEYWORDS: Diffractive optical elements, Telecommunications, Optical fibers, Multiplexing, Diffraction gratings, Diffraction, Optical design, Wavelength division multiplexing, Semiconductor lasers, Binary data

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Proceedings Article | 31 December 2003 Paper

Investigation of multimode dispersionless beams

Vladimir Pavelyev, Victor Soifer, Michael Duparre, Barbara Luedge

Proceedings Volume 5182, (2003) https://doi.org/10.1117/12.509077

KEYWORDS: Diffractive optical elements, Cameras, Phase shifts, Light wave propagation, Waveguides, Computer simulations, Laser beam propagation, Beam propagation method, Gaussian beams, Geometrical optics

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Proceedings Article | 31 December 2003 Paper

Diamond DOEs for focusing IR laser beams into pregiven focal domains

Vladimir Pavelyev, Victor Soifer, Dimitriy Golovashkin, Vitaliy Kononenko, Vitaliy Konov, Sergey Pimenov, Michael Duparre, Barbara Luedge

Proceedings Volume 5182, (2003) https://doi.org/10.1117/12.509069

KEYWORDS: Diamond, Diffractive optical elements, Laser ablation, Chemical vapor deposition, Gas lasers, Carbon monoxide, Optics manufacturing, Quantization, Computer simulations, Diffraction

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Proceedings Article | 3 November 2003 Paper

Characterization of YAG laser beams at 1030 nm by diffractive optical correlation filters

Michael Duparre, Barbara Luedge, Carsten Rockstuhl, Andreas Letsch, Siegmund Schroeter, Vladimir Pavelyev

Proceedings Volume 5175, (2003) https://doi.org/10.1117/12.505622

KEYWORDS: Optical filters, Holograms, Image filtering, Electronic filtering, YAG lasers, Laser development, Computer simulations, Superposition, Modes of laser operation, Optical simulations

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Proceedings Article | 30 May 2003 Paper

On-line control of laser beam quality by means of diffractive optical components

Michael Duparre, Carsten Rockstuhl, Andreas Letsch, Siegmund Schroeter, Vladimir Pavelyev

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.473581

KEYWORDS: Holograms, Optical filters, Image filtering, Electronic filtering, Superposition, Modes of laser operation, Optical simulations, Laser development, Optics manufacturing, Resonators

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Proceedings Article | 25 February 2002 Paper

Laser shaping of diamond for IR diffractive optical elements

V. Kononenko, Vitali Konov, Sergej Pimenov, Alexander Prokhorov, Vladimir Pavelyev, Victor Soifer, Barbara Luedge, Michael Duparre

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456884

KEYWORDS: Diamond, Laser ablation, Diffractive optical elements, Chemical vapor deposition, Computer simulations, Manufacturing, Optics manufacturing, Excimer lasers, Pulsed laser operation, Laser processing

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Proceedings Article | 27 November 2000 Paper

Realization of an optical interconnection concept using transversal mode selection

Victor Soifer, S. Karpeev, Vladimir Pavelyev, Michael Duparre, Barbara Luedge

Proceedings Volume 4316, (2000) https://doi.org/10.1117/12.407671

KEYWORDS: Manufacturing, Telecommunications, Optical interconnects, Diffractive optical elements, Modes of laser operation, CCD cameras, Chemical elements, Transmission electron microscopy, Modulation, Beam splitters

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Proceedings Article | 27 November 2000 Paper

Designing DOEs for real-time analysis of beam mode content

S. Karpeev, Vladimir Pavelyev, Victor Soifer

Proceedings Volume 4316, (2000) https://doi.org/10.1117/12.407672

KEYWORDS: Beam analyzers, Phase shifts, Diffractive optical elements, Optical components, Beam splitters, Chemical elements, Laser applications, Computer simulations, Laser therapeutics, Experimental physics

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Proceedings Article | 25 October 2000 Paper

Laser beam characterization by means of diffractive optical correlation filters

Michael Duparre, Vladimir Pavelyev, Victor Soifer, Barbara Luedge

Proceedings Volume 4095, (2000) https://doi.org/10.1117/12.405266

KEYWORDS: Diffractive optical elements, Phase shifts, Beam analyzers, Optical filters, Beam splitters, Image filtering, Optical design, Optical components, Optics manufacturing, Laser beam characterization

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Proceedings Article | 7 June 2000 Paper

Excimer laser micromachining for fabrication of diamond diffractive optical elements

Vitali Konov, V. Kononenko, Sergej Pimenov, Alexander Prokhorov, Vladimir Pavelyev, Victor Soifer, Peter Muys, E. Vandamme

Proceedings Volume 3933, (2000) https://doi.org/10.1117/12.387570

KEYWORDS: Diamond, Laser ablation, Diffractive optical elements, Spherical lenses, Carbon dioxide lasers, Fresnel lenses, Excimer lasers, Chemical vapor deposition, Etching, Optical components

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Proceedings Article | 20 September 1999 Paper

CVD diamond transmissive diffractive optics for CO2 lasers

Vitali Konov, V. Kononenko, Sergej Pimenov, Alexander Prokhorov, Vladimir Pavelyev, Victor Soifer

Proceedings Volume 3822, (1999) https://doi.org/10.1117/12.364213

KEYWORDS: Diamond, Carbon dioxide lasers, Optical components, Chemical vapor deposition, Diffractive optical elements, Laser optics, Laser ablation, Surface finishing, Lenses, Polishing

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Proceedings Article | 27 August 1999 Paper

Invariant laser beams: fundamental properties and their investigation by computer simulation and optical experiment

Vladimir Pavelyev, Michael Duparre, Barbara Luedge, Victor Soifer, Richard Kowarschik, Dimitriy Golovashkin

Proceedings Volume 3737, (1999) https://doi.org/10.1117/12.360046

KEYWORDS: Waveguides, Beam propagation method, Wave propagation, Light wave propagation, Diffractive optical elements, Modes of laser operation, Geometrical optics, Telecommunications, Computer simulations, Diffraction

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Proceedings Article | 18 June 1998 Paper

Generation, superposition, and separation of Gauss-Hermite modes by means of DOEs

Michael Duparre, Vladimir Pavelyev, Barbara Luedge, Ernst-Bernhard Kley, Victor Soifer, Richard Kowarschik

Proceedings Volume 3291, (1998) https://doi.org/10.1117/12.310573

KEYWORDS: Manufacturing, Superposition, Chemical elements, Telecommunications, Optics manufacturing, Diffractive optical elements, Modes of laser operation, Optical components, Transmission electron microscopy, Modulation

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Proceedings Article | 10 March 1998 Paper

Iterative calculation and technological realization of DOE laser-beam focusing into nonaxial radially symmetrical domains

Victor Soifer, Vladimir Pavelyev, Michael Duparre, B. Ludge

Proceedings Volume 3348, (1998) https://doi.org/10.1117/12.302510

KEYWORDS: Diffractive optical elements, Energy efficiency, Numerical simulations, Gaussian beams, Etching, Computer simulations, Fourier transforms, Optical components, Photomasks, Optical design

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Proceedings Article | 1 November 1997 Paper

Forming of selected unimodal complex amplitude distributions by means of novel DOEs of MODAN type

Michael Duparre, Vladimir Pavelyev, Barbara Luedge, Ernst-Bernhard Kley, Richard Kowarschik, Victor Soifer

Proceedings Volume 3134, (1997) https://doi.org/10.1117/12.295137

KEYWORDS: Manufacturing, Energy efficiency, Optics manufacturing, Polymethylmethacrylate, Computer simulations, Diffractive optical elements, Optical components, Chemical elements, Transform theory, Phase measurement

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Proceedings Article | 22 September 1997 Paper

Iterative calculation, manufacture, and investigation of DOE forming unimodal complex amplitude distributions

Michael Duparre, Vladimir Pavelyev, Barbara Luedge, Ernst-Bernhard Kley, Richard Kowarschik, Victor Soifer

Proceedings Volume 3110, (1997) https://doi.org/10.1117/12.281398

KEYWORDS: Diffractive optical elements, Manufacturing, Energy efficiency, Optics manufacturing, Polymethylmethacrylate, Transform theory, Computer simulations, Etching, Interferometry, Modes of laser operation

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Proceedings Article | 6 June 1995 Paper

Hybrid method for calculating diffractive optical elements (DOEs) focusing into radial focal domain

Victor Soifer, Leonid Doskolovich, Nikolay Kazanskiy, Vladimir Pavelyev

Proceedings Volume 2426, (1995) https://doi.org/10.1117/12.211211

KEYWORDS: Diffractive optical elements, Fourier transforms, Iterative methods, Energy efficiency, Diffraction, Bessel functions, Image processing, Image segmentation, Optical components, Superposition

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Proceedings Article | 19 January 1995 Paper

Phase diffractive optical elements calculation using a generalized projections method

Michael Golub, Vladimir Pavelyev, Victor Soifer

Proceedings Volume 2363, (1995) https://doi.org/10.1117/12.199643

KEYWORDS: Diffractive optical elements, Space operations, Diffraction, Image processing, Holograms, Reconstruction algorithms, 3D image reconstruction, Energy efficiency, Chemical elements, Phase shift keying

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Proceedings Article | 19 January 1995 Paper

Software on diffractive optics and computer-generated holograms

Leonid Doskolovich, Michael Golub, Nikolay Kazanskiy, Alexander Khramov, Vladimir Pavelyev, P. Seraphimovich, Victor Soifer, S. Volotovskiy

Proceedings Volume 2363, (1995) https://doi.org/10.1117/12.199645

KEYWORDS: Diffractive optical elements, Visualization, Wavefronts, Image processing, Composites, Lens design, Computer generated holography, Binary data, Fourier transforms, Spherical lenses

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