Dr. Walter Liu Profile

Dr. Walter Liu

at EMD Electronics

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Publications (1)

Proceedings Article | 15 April 2008 Paper

High-etch-rate low-bias bow outgassing BARC via-filling materials for 193-nm ArF lithographic process

Huirong Yao, Zhong Xiang, Salem Mullen, Jian Yin, Walter Liu, Jianhui Shan, Elleazar Gonzalez, Guanyang Lin, Mark Neisser

Proceedings Volume 6923, 69232J (2008) https://doi.org/10.1117/12.773400

KEYWORDS: Etching, Lithography, Polymers, Reflectivity, Semiconducting wafers, Coating, Immersion lithography, Chromophores, Scanning electron microscopy, Bottom antireflective coatings

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