Mr. Yang Liu Profile

Yang Liu

at Beijing Institute of Technology

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 13 December 2021 Paper

Comprehensive and quantitative characterization and analysis method of 3D mask effect for lithography simulation

Enze Li, Yanqiu Li, Yang Liu, Yiyu Sun, Pengzhi Wei

Proceedings Volume 12073, 120730F (2021) https://doi.org/10.1117/12.2604846

KEYWORDS: Photomasks, Polarization, 3D modeling, Lithography, Projection systems, Analytical research, Fourier transforms

Read Abstract +

Proceedings Article | 1 November 2021 Paper

Fast lithographic source pupil optimization using difference of convex functions algorithm for transformed L1 penalty

Yiyu Sun, Yanqiu Li, Guanghui Liao, Miao Yuan, Yang Liu, Yaning Li, Lulu Zou, Lihui Liu

Proceedings Volume 12057, 120570I (2021) https://doi.org/10.1117/12.2604052

KEYWORDS: Lithography, Optimization (mathematics), Algorithm development, Imaging systems, Zernike polynomials, Compressed sensing, Semiconducting wafers, Photomasks, Modulation, Lithium

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years