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Yohei Tanaka
at Gigaphoton Inc
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Publications (1)
Proceedings Article | 2 March 2020 Paper
High peak power DUV laser processing
Yasuhiro Kamba, Hironori Igarashi, Takashi Onose, Taisuke Miura, Ryoichi Nohdomi, Hiroaki Oizumi, Yoshihiko Murakami, Atsushi Fuchimukai, Chen Qu, Yuki Tamaru, Yohei Tanaka, Yuujirou Sasaki, Junichi Fujimoto, Hakaru Mizoguchi
Proceedings Volume 11273, 112730L (2020) https://doi.org/10.1117/12.2549826
KEYWORDS: Excimer lasers, Deep ultraviolet, Laser processing, Pulsed laser operation, Picosecond phenomena, Laser drilling, Semiconductors, Lithography, Fiber lasers, Light sources
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