Dr. Yoshio Wada Profile

Dr. Yoshio Wada

at Megaopto Co Ltd

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Publications (1)

Proceedings Article | 17 February 2010 Paper

Highly reliable 198-nm light source for semiconductor inspection based on dual fiber lasers

Shinichi Imai, Kazuto Matsuki, Nobutaka Kikuiri, Katsuhiko Takayama, Osamu Iwase, Yoshiharu Urata, Tatsuya Shinozaki, Yoshio Wada, Satoshi Wada

Proceedings Volume 7580, 75800H (2010) https://doi.org/10.1117/12.840467

KEYWORDS: Light sources, Inspection, Fiber lasers, Fiber amplifiers, Photomasks, Optical amplifiers, Semiconductors, Pulsed laser operation, Oscillators

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