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Youngmin Jo

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Proceedings Article | 21 May 2011 Paper

A self-protecting uncooled microbolometer structure for uncooled microbolometer

Youngmin Jo, Il-Woong Kwon, Dong Soo Kim, Hyun Bin Shim, Hee Chul Lee

Proceedings Volume 8012, 80121O (2011) https://doi.org/10.1117/12.884432

KEYWORDS: Microbolometers, Resistance, Sensors, Infrared radiation, Vanadium, Aluminum, Oxides, Temperature metrology, Silica, Thermography

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During microbolometer operation, the detector occasionally views high temperature scenes such as the sun or flames at very close distance. The detector temperature can then increase to a level so high that the sensing material experiences an annealing effect. Accordingly, the microbolometer is required to stand high temperatures that can cause device damage. In this paper, a bimorph leg integrated microbolometer structure is proposed. The bimorph leg is an extra leg that is separated from the signal transfer legs. It is bent downward and snaps onto the substrate when the microbolometer's temperature reaches a critical temperature. The temperature of the micro-bolometer is then decreased as heat is transferred to the substrate. By snapping the bimorph leg down onto the substrate, the microbolometer's thermal conductance is temporarily increased roughly three-fold higher than that of the normal state and thermal damage to the bolometer material can be effectively prevented. The increase of thermal conductance can be controlled by changing the size of the bimorph leg.

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