Yuki Furukawa
at Nissan Chemical Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 10 April 2024 Presentation
Satoshi Takeda, Wataru Shibayama, Rikimaru Sakamoto, Syuhei Shigaki, Yuki Furukawa, Taiki Saijo, Kodai Kato, Seonggil Heo, Hyo Seon Suh
Proceedings Volume 12957, 1295702 (2024) https://doi.org/10.1117/12.3010078
KEYWORDS: Optical lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Capillaries, Metal oxides, Liquids, Dry etching, Materials processing

Proceedings Article | 9 April 2024 Presentation + Paper
Wataru Shibayama, Shuhei Shigaki, Satoshi Takeda, Kodai Kato, Yuki Furukawa, Taiki Saijo, Makoto Nakajima, Rikimaru Sakamoto
Proceedings Volume 12957, 1295716 (2024) https://doi.org/10.1117/12.3011014
KEYWORDS: Extreme ultraviolet, Optical lithography, Film thickness, Extreme ultraviolet lithography, Etching, Coating, Chemical vapor deposition, Windows, Surface roughness, Lithography

Proceedings Article | 22 November 2023 Presentation
Satoshi Takeda, Wataru Shibayama, Kodai Kato, Shuhei Shigaki, Yuki Furukawa, Taiki Saijo, Makoto Nakajima, Rikimaru Sakamoto
Proceedings Volume PC12750, PC1275006 (2023) https://doi.org/10.1117/12.2684973
KEYWORDS: Optical lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Capillaries, Polymers, Metal oxides, Materials processing, Liquids, Dry etching

Proceedings Article | 22 November 2023 Poster
Taiki Saijo, Yuki Furukawa, Shuhei Shigaki, Satoshi Takeda, Wataru Shibayama, Makoto Nakajima, Rikimaru Sakamoto, Kodai Kato
Proceedings Volume PC12750, PC127500T (2023) https://doi.org/10.1117/12.2687489
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Etching, Chemical vapor deposition, Windows, Tin, Silica, Optical lithography, Lithography, Coating

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