Prof. Zhili Hao Profile

Prof. Zhili Hao

at Old Dominion Univ

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Author

Publications (3)

Proceedings Article | 1 April 2009 Paper

Bio/chemical sensors heterogeneously integrated with Si-CMOS circuitry

Frances Williams, Moriba George, Ozgul Yasar, Demetris Geddis, Zhili Hao

Proceedings Volume 7291, 72910N (2009) https://doi.org/10.1117/12.817872

KEYWORDS: Sensors, Acoustics, Wave plates, Integrated circuits, Biosensing, Silicon, Integrated circuit design, Electronic circuits, Transducers, Wave sensors

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Proceedings Article | 30 March 2009 Paper

Investigating energy loss mechanisms in an SOI-based tuning-fork gyroscope

Yang Xu, Shiva Durgam, Zhili Hao, Frances Williams, Linda Vahala

Proceedings Volume 7292, 72921F (2009) https://doi.org/10.1117/12.815640

KEYWORDS: Gyroscopes, Wave propagation, Finite element methods, Data modeling, Transducers, Computer simulations, Thermal modeling, Signal detection, Mathematical modeling, HF etching

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Proceedings Article | 30 March 2009 Paper

An SOI-based tuning-fork gyroscope with high quality factors

Ren Wang, Shiva Durgam, Zhili Hao, Linda Vahala

Proceedings Volume 7292, 729238 (2009) https://doi.org/10.1117/12.817692

KEYWORDS: Gyroscopes, Electrodes, Microelectromechanical systems, Signal detection, Semiconducting wafers, Sensors, Polarization, Transducers, Prototyping, Silicon

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