Dr. Zhixiang Liu Profile

Dr. Zhixiang Liu

at Institute of Optics and Electronics CAS

SPIE Involvement:

Author

Publications (5)

SPIE Journal Paper | 23 February 2018

Wavefront-aberration measurement and systematic-error analysis of a high numerical-aperture objective

Zhixiang Liu, Tingwen Xing, Yadong Jiang, Baobin Lv

OE, Vol. 57, Issue 02, 024107, (February 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.2.024107

KEYWORDS: Wavefronts, Sensors, Diffraction gratings, Error analysis, Diffraction, Wavefront aberrations, Distortion, Calibration, Fourier transforms, Manufacturing

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Proceedings Article | 24 September 2015 Paper

Two-dimension lateral shearing interferometry with dual-mode

Zhixiang Liu, Tingwen Xin, Yadong Jiang, Baobin Lv, Fuchao Xu

Proceedings Volume 9628, 962817 (2015) https://doi.org/10.1117/12.2189878

KEYWORDS: Wavefronts, Phase shifting, Fourier transforms, Diffraction, Diffraction gratings, Interferometry, Objectives, Shearing interferometers, Microscopes, Optical design

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Proceedings Article | 5 November 2014 Paper

Two-dimension lateral shearing interferometry for microscope objective wavefront metrology

Zhixiang Liu, Tingwen Xing, Yadong Jiang, Baobin Lv, Fuchao Xu

Proceedings Volume 9272, 92721B (2014) https://doi.org/10.1117/12.2071500

KEYWORDS: Wavefronts, Diffraction gratings, Microscopes, Objectives, Diffraction, Shearing interferometers, Fourier transforms, Interferometry, Zernike polynomials, Wavefront metrology

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Proceedings Article | 13 May 2013 Paper

Absolute testing of flats with all terms by using even and odd functions

Xin Jia, Fuchao Xu, Tingwen Xing, Zhixiang Liu

Proceedings Volume 8789, 878911 (2013) https://doi.org/10.1117/12.2019722

KEYWORDS: Prisms, Zernike polynomials, Optical testing, Error analysis, Testing and analysis, Interferometry, Electronics, Metrology, Spatial frequencies, Phase shifting

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Proceedings Article | 15 October 2012 Paper

Analysis to the measurement error on the index homogeneity of optical material

Zhiyuan Liao, Tingwen Xing, Zhixiang Liu

Proceedings Volume 8417, 84173G (2012) https://doi.org/10.1117/12.975921

KEYWORDS: Error analysis, Zernike polynomials, Photovoltaics, Interferometry, Monochromatic aberrations, Interferometers, Wavefronts, Wavefront analysis, Imaging systems, Optical testing

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