Mr. Hyun-Chul Kim Profile

Hyun-Chul Kim

at Synopsys Korea Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 30 April 2023 Presentation

Machine learning based inverse lithography technology for an advanced DRAM contact layer

Moongyu Jeong, Hyunchul Kim, Kyle Braam, Munhoe Do, Kangjin Kim, Jongcheon Park, Chunsoo Kang, Chanha Park, Thomas Cecil

Proceedings Volume 12495, 124951E (2023) https://doi.org/10.1117/12.2657808

KEYWORDS: Machine learning, Lithography, Photomasks, Source mask optimization, Numerical analysis, Convolutional neural networks, Computational lithography

Read Abstract +

Proceedings Article | 2 April 2014 Paper

High-precision self-tool CD matching with focus-target assist pattern by computational ways

Sung-Man Kim, Hyun-Chul Kim, Jung-Woo Lee, Young-Seok Kim, Yong-Ho Kim, Sung-Keun Won, Sung-il (Andrew) Kim, Ki-Yeop (Chris) Park, Chang-Hoon Ryu, Qi-Tong Fan, Ki-Ho Baik

Proceedings Volume 9050, 90502X (2014) https://doi.org/10.1117/12.2047272

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Control systems, Photoresist processing, Scanners, Image processing, Finite element methods, Optical proximity correction, Imaging systems, Lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years