xuefeng wang
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 May 2006 Paper
Jun Zou, Xuefeng Wang, David Bullen, Chang Liu, Chad Mirkin
Proceedings Volume 6223, 62230N (2006) https://doi.org/10.1117/12.666389
KEYWORDS: Scanning probe lithography, Silicon, Semiconducting wafers, Metals, Polymers, Atomic force microscopy, Gold, Etching, Nickel, Actuators

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