The topology image of an atomic force microscope is obtained by picking up a controlled output of a force-feedback loop that is proportional to the height of a sample under the assumption that no dynamics in a z-axis actuator exist. However, the dynamic effects such as hysteresis and creep in a PZT driving z-axis actuator cannot be ignored. To solve this problem, a strain-gage sensor is used as an additional sensor, which enables measurement of the absolute displacement of a z-axis PZT nano scanner. The advantage of using an additional sensor is experimentally provided and validated in topology images.
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