Advanced fast 3D DSA model development and calibration for design technology co-optimization

Kafai Lai; Balint Meliorisz; Thomas Muelders; Ulrich Welling; Hans-Jürgen Stock; Sajan Marokkey; Wolfgang Demmerle; Chi-Chun Liu; Cheng Chi; Jing Guo

doi:10.1117/12.2260379

27 April 2017 Advanced fast 3D DSA model development and calibration for design technology co-optimization

Kafai Lai, Balint Meliorisz, Thomas Muelders, Ulrich Welling, Hans-Jürgen Stock, Sajan Marokkey, Wolfgang Demmerle, Chi-Chun Liu, Cheng Chi, Jing Guo

Author Affiliations +

Proceedings Volume 10144, Emerging Patterning Technologies; 101440H (2017) https://doi.org/10.1117/12.2260379
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

Direct Optimization (DO) of a 3D DSA model is a more optimal approach to a DTCO study in terms of accuracy and speed compared to a Cahn Hilliard Equation solver. DO’s shorter run time (10X to 100X faster) and linear scaling makes it scalable to the area required for a DTCO study. However, the lack of temporal data output, as opposed to prior art, requires a new calibration method. The new method involves a specific set of calibration patterns. The calibration pattern’s design is extremely important when temporal data is absent to obtain robust model parameters. A model calibrated to a Hybrid DSA system with a set of device-relevant constructs indicates the effectiveness of using nontemporal data. Preliminary model prediction using programmed defects on chemo-epitaxy shows encouraging results and agree qualitatively well with theoretical predictions from a strong segregation theory.

Conference Presentation

Citation Download Citation

Kafai Lai, Balint Meliorisz, Thomas Muelders, Ulrich Welling, Hans-Jürgen Stock, Sajan Marokkey, Wolfgang Demmerle, Chi-Chun Liu, Cheng Chi, and Jing Guo "Advanced fast 3D DSA model development and calibration for design technology co-optimization", Proc. SPIE 10144, Emerging Patterning Technologies, 101440H (27 April 2017); https://doi.org/10.1117/12.2260379

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE