Fabrication of Al2O3/TiO2 reflective type anti-blue light multi-layers with atomic layer deposition

Jinhui Yang; Xueliang Lv; Zijin Li; Kaiyu Li; Qing Li; Tiezhu Bo; Yang Zhang; Jingming Zheng; Hui Liu; Jinsheng Jia

doi:10.1117/12.2606712

24 November 2021 Fabrication of Al₂O₃/TiO₂reflective type anti-blue light multi-layers with atomic layer deposition

Jinhui Yang, Xueliang Lv, Zijin Li, Kaiyu Li, Qing Li, Tiezhu Bo, Yang Zhang, Jingming Zheng, Hui Liu, Jinsheng Jia

Proceedings Volume 12062, AOPC 2021: Optoelectronics and Nanophotonics; 120620O (2021) https://doi.org/10.1117/12.2606712
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

The aim of this work is the formation of anti-blue light coatings which are suitable for application on 3C products. Atomic layer deposition was used to deposit Al₂O3 and TiO₂ single layer films onto glass substrates at 250 °C. Optical characterization of the films was conducted to evaluate whether the thickness was suitable for the fabrication of multipair reflective coatings. The refractive indices of the films measured at an optical wavelength of 450 nm were 1.68 (67 nm, Al₂O₃) and 2.67 (42 nm, TiO₂). Al₂O₃/TiO₂ multilayer DBRs with 1.5, 3.5, 5.5 and 7.5 pairs were deposited on glass substrates. The thickness of each layer of Al₂O₃ and TiO₂ films were 63.7 and 49.6 nm in the multilayer structure measured via FE-TEM. When 1.5-pair Al₂O₃/TiO₂ DBRs were deposited on the glass substrate, the films had high transparency, and less reflective effect were observed. As 3.5, 5.5 and 7.5-pair DBRs were deposited on the glass substrates, the Bragg reflection effect became apparent. We found 7.5-pair Al₂O₃/TiO₂ DBRs prepared by ALD had the best central and bandwidth of the Bragg reflection effect for blue light.

Citation Download Citation

Jinhui Yang, Xueliang Lv, Zijin Li, Kaiyu Li, Qing Li, Tiezhu Bo, Yang Zhang, Jingming Zheng, Hui Liu, and Jinsheng Jia "Fabrication of Al₂O₃/TiO₂reflective type anti-blue light multi-layers with atomic layer deposition", Proc. SPIE 12062, AOPC 2021: Optoelectronics and Nanophotonics, 120620O (24 November 2021); https://doi.org/10.1117/12.2606712

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