Paper
30 January 2022 Monte Carlo simulation of picosecond laser irradiation photoresponse of deep submicron SOI MOSFET
Andrei V. Borzdov, Vladimir M. Borzdov, Vladimir V. Vyurkov
Author Affiliations +
Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121570Y (2022) https://doi.org/10.1117/12.2624174
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation
Abstract
Drain current photoresponse of deep submicron SOI MOSFET with 50 nm channel length is simulated by ensemble Monte Carlo method. The photoresponse is simulated under the effect of picosecond laser pulses with 532 and 650 nm wavelengths at 5⋅1010 and 1011 W/m2 intensity. The current decay and the dynamics of generated charge carriers in the transistor channel are studied.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrei V. Borzdov, Vladimir M. Borzdov, and Vladimir V. Vyurkov "Monte Carlo simulation of picosecond laser irradiation photoresponse of deep submicron SOI MOSFET", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121570Y (30 January 2022); https://doi.org/10.1117/12.2624174
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KEYWORDS
Monte Carlo methods

Field effect transistors

Transistors

Laser irradiation

Semiconductors

Silicon

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