OPC accuracy enhancement through systematic OPC calibration and verification methodology for sub-100nm node

Hyunjo Yang; Jaeseung Choi; Byungug Cho; Byeongho Cho; Donggyu Yim; Jinwoong Kim

doi:10.1117/12.599728

10 May 2005 OPC accuracy enhancement through systematic OPC calibration and verification methodology for sub-100nm node

Hyunjo Yang, Jaeseung Choi, Byungug Cho, Byeongho Cho, Donggyu Yim, Jinwoong Kim

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.599728
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

New generation DRAM devices such as high speed Graphic DRAMs demand smaller size transistors and very precise CD control. However, the application of very high NA and aggressive Resolution Enhancement Techniques (RETs) increases Isolated-dense bias and leaves very small process window for isolated transistor patterns. It implies that a very aggressive and also very delicate OPC work is required for these new generation devices. A novel measurement system which can compare CD SEM image with CAD data has been developed and we were able to systematically calibrate OPC modeling and verify modeling accuracy by connecting this measurement system with OPC tools. In this paper, the functions of the novel measurement system are presented and the application to the OPC calibration and OPC accuracy verification are presented. This novel measurement system was very useful for 2D model calibration. We were able to enhance OPC accuracy through this systematic OPC calibration and verification methodology.

Citation Download Citation

Hyunjo Yang, Jaeseung Choi, Byungug Cho, Byeongho Cho, Donggyu Yim, and Jinwoong Kim "OPC accuracy enhancement through systematic OPC calibration and verification methodology for sub-100nm node", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.599728

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available