A CD AFM study of the plasma impact on 193nm photoresist LWR: role of plasma UV and ions

E. Pargon; M. Martin; K. Menguelti; L. Azarnouche; J. Foucher; O. Joubert

doi:10.1117/12.813493

23 March 2009 A CD AFM study of the plasma impact on 193nm photoresist LWR: role of plasma UV and ions

E. Pargon, M. Martin, K. Menguelti, L. Azarnouche, J. Foucher, O. Joubert

Proceedings Volume 7272, Metrology, Inspection, and Process Control for Microlithography XXIII; 72720M (2009) https://doi.org/10.1117/12.813493
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

193nm photoresist pattern printed by optical lithography are known to present significant sidewalls roughness, also called linewidth roughness (LWR) after the lithographic step, that is partially transferred into the underlayers during plasma etching processes. This study is aimed to identify the factors that impact the photoresist pattern sidewalls roughness during plasma exposure. Among them, plasma VUV light (110-210nm) is identified as being the main contributor to LWR decrease during plasma etching processes. Moreover, it was found that the LWR obtained after plasma exposure is strongly dependent on the surface roughening mechanisms taking place at the top of the resist pattern.

Citation Download Citation

E. Pargon, M. Martin, K. Menguelti, L. Azarnouche, J. Foucher, and O. Joubert "A CD AFM study of the plasma impact on 193nm photoresist LWR: role of plasma UV and ions", Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 72720M (23 March 2009); https://doi.org/10.1117/12.813493

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available