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1 April 2022 Engraving depth-controlled nanohole arrays at the surface of glass by tailored laser beam processing
Nicolas Sanner, Xin Liu, Srijoyee Datta, Raphaël Clady, Olivier Utéza
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Proceedings Volume PC11990, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2022; PC1199007 (2022) https://doi.org/10.1117/12.2614661
Event: SPIE LASE, 2022, San Francisco, California, United States
Abstract
Arrays of nanoholes or nanochannels constitute the building block of integrated devices that open attractive applications like 2D photonic crystals, 2D metamaterials or nanostructured surfaces. Here we present a laser-based technique that enables to generate short-length micro-Bessel beams (irrespective of their core diameter) that we further use to machine depth-controlled holes with a cylindrical depth profile. We illustrate the potential of this method by fabricating square arrays of subwavelength-diameter holes with several-micrometers depth by direct laser ablation at the surface of fused silica.
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Nicolas Sanner, Xin Liu, Srijoyee Datta, Raphaël Clady, and Olivier Utéza "Engraving depth-controlled nanohole arrays at the surface of glass by tailored laser beam processing", Proc. SPIE PC11990, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2022, PC1199007 (1 April 2022); https://doi.org/10.1117/12.2614661
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KEYWORDS
Glasses
Laser engraving
Laser ablation
Bessel beams
Laser processing
Metamaterials
Nanolithography
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