Prof. Bruno S. Bauer Profile

Prof. Bruno S. Bauer

Associate Professor of Physics at Univ of Nevada/Reno

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Author

Publications (17)

Proceedings Article | 24 March 2006 Paper

Investigation of a novel discharge EUV source for microlithography

Bruno Bauer, Volodymyr Makhin, Stephan Fuelling, Irvin Lindemuth

Proceedings Volume 6151, 61513N (2006) https://doi.org/10.1117/12.656817

KEYWORDS: Plasma, Magnetism, Extreme ultraviolet, Xenon, Mirrors, Ions, Numerical simulations, Optical lithography, Physics, Helium

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Proceedings Article | 6 May 2005 Paper

Development of laser deposition package for modeling of EUV sources for microlithography

Volodymyr Makhin, Bruno Bauer, Irvin Lindemuth, Bryan Rice

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599942

KEYWORDS: Plasma, Ionization, Xenon, Absorption, Extreme ultraviolet, Electrons, Lithium, Laser energy, Ions, Laser development

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Proceedings Article | 20 May 2004 Paper

Development of magnetohydrodynamic computer modeling of gas-discharge EUV sources for microlithography

Bruno Bauer, Roberto Mancini, Volodymyr Makhin, Ioana Paraschiv, Andrey Esaulov, Radu Presura, Irvin Lindemuth, Peter Sheehey, Bryan Rice

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.536289

KEYWORDS: Plasma, Electrons, Xenon, Ionization, Extreme ultraviolet, Optical lithography, Ions, Computer simulations, Sensors, Physics

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Proceedings Article | 16 June 2003 Paper

Development of radiation-magnetohydrodynamic computer modeling of gas-discharge EUV sources for microlithography

Bruno Bauer, Andrey Esaulov, Volodymyr Makhin, Roberto Mancini, Ioana Paraschiv, Radu Presura, Irvin Lindemuth, Peter Sheehey, Bryan Rice

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484933

KEYWORDS: Plasma, Xenon, Electrons, Extreme ultraviolet, Ions, Computer simulations, Electrodes, Ionization, Optical lithography, Physics

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Proceedings Article | 18 December 2001 Paper

Multichannel fast hard x-ray spectrometer with spatial resolution capability for extended z-pinch plasma sources

Hank LeBeau, Dmitry Fedin, Victor Kantsyrev, Bruno Bauer, Sean Keely, A. Kessler, Wade Cline, Gene Newman

Proceedings Volume 4507, (2001) https://doi.org/10.1117/12.450764

KEYWORDS: Spectroscopy, Diodes, Hard x-rays, Plasma, Spatial resolution, X-rays, Optical filters, Sensors, X-ray sources, Diagnostics

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Proceedings Article | 18 December 2001 Paper

Application of new five-channel x-ray/EUV spectrometer with an imaging transmission diffraction grating for study of z-pinch plasma sources

Dmitry Fedin, Victor Kantsyrev, Bruno Bauer, Stephan Fuelling, Sean Keely, Hank LeBeau, Gene Newman, Wade Cline

Proceedings Volume 4507, (2001) https://doi.org/10.1117/12.450765

KEYWORDS: Plasma, Spectroscopy, Diffraction gratings, Sensors, X-rays, Crystals, Aluminum, Spectral resolution, Spatial resolution, Optical filters

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Proceedings Article | 6 December 2001 Paper

Features of x-ray radiation from a point-like laser plasma and z-pinch sources transported by glass capillary converters (theory)

Sergei Kukhlevsky, Victor Kantsyrev, Dmitry Fedin, Gergely Nyitray, Bruno Bauer, Nick Ouart

Proceedings Volume 4502, (2001) https://doi.org/10.1117/12.449861

KEYWORDS: X-rays, Capillaries, Plasma, Waveguides, Diffraction, X-ray optics, Extreme ultraviolet, Geometrical optics, Glasses, X-ray lasers

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Proceedings Article | 6 December 2001 Paper

Powerful microfocus x-ray and hard x-ray 1 MA x-pinch plasma source for imaging, spectroscopy, and polarimetry

Victor Kantsyrev, Bruno Bauer, Alla Shlyaptseva, Dmitri Fedin, Stephanie Hansen, Radu Presura, Stephan Fuelling, Steve Batie, Andrew Oxner, Harold Faretto, Nick Ouart, Sean Keely, Hank LeBeau, David Chamberlain

Proceedings Volume 4502, (2001) https://doi.org/10.1117/12.449868

KEYWORDS: X-rays, Molybdenum, Iron, Hard x-rays, X-ray imaging, Plasma, Imaging spectroscopy, Electron beams, Spectroscopy, Platinum

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Proceedings Article | 28 November 2000 Paper

Advanced x-ray/EUV diagnostics for spectroscopy, imaging, and polarimetry at the Nevada Terawatt Facility z-pinch plasma source

Victor Kantsyrev, Bruno Bauer, Alla Shlyaptseva, Dmitry Fedin, Stephanie Hansen, Radu Presura, David Chamberlain, Nick Ouart, Alex Jones, Hank LeBeau

Proceedings Volume 4138, (2000) https://doi.org/10.1117/12.407560

KEYWORDS: X-rays, Spectroscopy, Plasma, X-ray imaging, Diagnostics, Crystals, Imaging spectroscopy, Titanium, Extreme ultraviolet, Optical filters

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Proceedings Article | 2 November 2000 Paper

X-pinch driven by 0.9 MA: a powerful pulsed soft x-ray point source

Victor Kantsyrev, Bruno Bauer, Alla Shlyaptseva, Dmitry Fedin, Stephanie Hansen, Radu Presura, Steve Batie, Wade Cline, Harold Faretto, Bruno Le Galloudec, Andrew Oxner, Diana McCrorey, Nick Ouart, Hank LeBeau

Proceedings Volume 4144, (2000) https://doi.org/10.1117/12.405903

KEYWORDS: X-rays, Titanium, X-ray imaging, X-ray sources, Extreme ultraviolet, Plasma, Optical filters, Spatial resolution, Iron, Diodes

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Proceedings Article | 2 November 2000 Paper

Features of soft x-ray and x-ray radiation from point laser plasma and z-pinch sources transported by glass capillary converters

Victor Kantsyrev, Dmitry Fedin, Sergei Kukhlevsky, Bruno Bauer, Nick Ouart

Proceedings Volume 4144, (2000) https://doi.org/10.1117/12.405899

KEYWORDS: Capillaries, X-rays, Plasma, Glasses, X-ray sources, Optical filters, X-ray imaging, Extreme ultraviolet, Beam shaping, Spectroscopy

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Proceedings Article | 25 November 1999 Paper

Polychromator five-channel x-ray/EUV spectrometer with imaging transmission grating for plasma diagnostics

Dmitry Fedin, Victor Kantsyrev, Bruno Bauer, Alla Shlyaptseva, Igor Brytov

Proceedings Volume 3764, (1999) https://doi.org/10.1117/12.371101

KEYWORDS: Spectroscopy, Plasma, Diffraction gratings, X-rays, Diodes, Crystals, Sensors, Spatial resolution, Spectral resolution, Temporal resolution

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Proceedings Article | 29 September 1999 Paper

Development and application of the x-ray/EUV calibration facility with a laser plasma source for plasma diagnostics and biomedical x-ray microscopy

Victor Kantsyrev, Bruno Bauer, Nelson Publicover, Dmitry Fedin, Nicholas Ammons

Proceedings Volume 3766, (1999) https://doi.org/10.1117/12.363642

KEYWORDS: Plasma, X-rays, X-ray microscopy, X-ray imaging, Calibration, Spectrometers, Diagnostics, Capillaries, Diodes, Microchannel plates

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Proceedings Article | 29 September 1999 Paper

Novel x-ray and EUV two-dimensional imaging glass-capillary spectrometer for Z-pinch plasma diagnostics

Victor Kantsyrev, Bruno Bauer, Dmitry Fedin, Alla Shlyaptseva, Stephanie Hansen, Ioana Paraschiv

Proceedings Volume 3766, (1999) https://doi.org/10.1117/12.363657

KEYWORDS: X-rays, Plasma, Spectroscopy, X-ray imaging, Capillaries, Extreme ultraviolet, Crystals, Photoemission spectroscopy, Prototyping, Spatial resolution

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Proceedings Article | 17 December 1998 Paper

EUV and x-ray instrumentation for spectrometry, polarimetry, and imaging in hot plasma diagnostics, atomic physics, and x-ray microscopy: a status report

Victor Kantsyrev, Bruno Bauer, Ronald Phaneuf

Proceedings Volume 3443, (1998) https://doi.org/10.1117/12.333602

KEYWORDS: X-rays, Extreme ultraviolet, Spectroscopy, Capillaries, Plasma, X-ray imaging, Polarization, X-ray microscopy, Polarimetry, Plasma diagnostics

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Proceedings Article | 8 December 1995 Paper

Plasma electrode pockels cell for ICF lasers

Mark Rhodes, Charles Boley, Alfonso Tarditi, Bruno Bauer

Proceedings Volume 2633, (1995) https://doi.org/10.1117/12.228323

KEYWORDS: Plasma, Crystals, Electrons, Ions, Electrodes, Switches, Electro optical modeling, Switching, Prototyping, Tellurium

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Proceedings Article | 18 September 1995 Paper

X-ray emission from colliding laser plasmas

Mark Wilke, Andrew Obst, Dan Winske, Michael Jones, Stuart Baker, Joseph Abdallah, Stephen Caldwell, Robert Watt, S. Robert Goldman, Bruno Bauer, Robert Gibson

Proceedings Volume 2523, (1995) https://doi.org/10.1117/12.220984

KEYWORDS: Plasmas, Ions, Gold, X-rays, Spectroscopy, Picosecond phenomena, X-ray imaging, Tellurium, Chromium, Diagnostics

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Showing 5 of 17 publications

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