Ms. Chao Yin Chen Profile

Chao Yin Chen

at United Microelectronics Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 2 April 2014 Paper

William Chou, Hsien-Min Chang, Chao Yin Chen, M. Wagner, K.-D. Roeth, S. Czerkas, M. Ferber, M. Daneshpanah, F. Laske, R. Chiang, S. Klein

Proceedings Volume 9050, 90501Q (2014) https://doi.org/10.1117/12.2049000

KEYWORDS: Photomasks, Semiconducting wafers, Reticles, Overlay metrology, Metrology, Logic, Data modeling, Lithography, Process control, Ions

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Keywords/Phrases