Dr. Chen Zhang Profile

Dr. Chen Zhang

at IBM Corp

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Publications (1)

Proceedings Article | 28 April 2023 Presentation + Paper

Next-generation logic design architecture for vertical-transport nanosheets

B. Senapati, J. Do, A. Young, D. Dechene, S, Song, Y. Park, J. Kong, N. Lanzillo, C. Zhang, S. Fan, S. Baek, S. Mukesh, H. Jagannathan, B. Anderson, T. Wu, D. Guo, K.-I. Seo, H. Bu

Proceedings Volume 12495, 124950L (2023) https://doi.org/10.1117/12.2658187

KEYWORDS: Nanosheets, Logic, Design and modelling, Fin field effect transistors, Field effect transistors, Transistors, Optical lithography, Industry, Metals, Double patterning technology

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