Dr. Chen Zhang
at IBM Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12495, 124950L (2023) https://doi.org/10.1117/12.2658187
KEYWORDS: Nanosheets, Logic, Design and modelling, Fin field effect transistors, Field effect transistors, Transistors, Optical lithography, Industry, Metals, Double patterning technology

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