Dr. Cornel R. Marxer
at Sercalo Microtechnology Ltd
SPIE Involvement:
Author
Area of Expertise:
Optical MEMS , MEMS mirror , Fiber Optic MEMS , MEMS Foundry
Publications (13)

Proceedings Article | 16 August 2004 Paper
Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544915
KEYWORDS: Mirrors, Optical fibers, Electrodes, Actuators, Switches, Optical components, Collimators, Optical alignment, Optical networks, Microopto electromechanical systems

Proceedings Article | 20 October 2000 Paper
Laurent Dellmann, Cornel Marxer, Nico de Rooij
Proceedings Volume 4230, (2000) https://doi.org/10.1117/12.404900
KEYWORDS: Switches, Mirrors, Switching, Fusion splicing, Microopto electromechanical systems, Actuators, Microtechnology, Optical fibers, Plasma etching, Plasma

Proceedings Article | 25 August 2000 Paper
Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij
Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396435
KEYWORDS: Microsystems, Microfabrication

Proceedings Article | 22 August 2000 Paper
Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396502
KEYWORDS: Mirrors, Fourier transforms, Spectroscopy, Sensors, Collimation, Modulation, Silicon, Actuators, Beam splitters, Optical components

Proceedings Article | 22 August 2000 Paper
Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij
Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396492
KEYWORDS: Silicon, Actuators, Sensors, Field effect transistors, Gas sensors, Microfabrication, Atomic force microscopy, Switches, Microsystems, Semiconducting wafers

Showing 5 of 13 publications
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