Prof. Dai Gyoung Kim Profile

Prof. Dai Gyoung Kim

Associate Professor at Hanyang Univ

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 May 2016 Paper

The impact of the residual stress on the EUV pellicle

Eun-Sang Park, Jae-Keun Choi, Min-Ha Kim, Sollee Hwang, Zahid Hussain Shamsi, Dai-Gyoung Kim, Hye-Keun Oh

Proceedings Volume 9984, 99840F (2016) https://doi.org/10.1117/12.2241276

KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Manufacturing, Photomasks, Heat flux, Mirrors, Reflectivity, Thin films, Optical lithography

Read Abstract +

Proceedings Article | 29 March 2006 Paper

Reflow modeling for elongated contact hole shape

Ji-Eun Lee, Dai-Gyoung Kim, Kang Baek Kim, Mi-Rim Jung, Hye-Young Kang, Jong-Sun Kim, Joo-Yoo Hong, Hye-Keun Oh, Jun-Tack Park

Proceedings Volume 6153, 61533T (2006) https://doi.org/10.1117/12.656286

KEYWORDS: Photoresist processing, Interfaces, Critical dimension metrology, Glasses, Resolution enhancement technologies, Optical proximity correction, Thin films, Mathematical modeling, Lithography, Motion models

Read Abstract +

Proceedings Article | 21 March 2006 Paper

Simulation of mask induced polarization effect on imaging in immersion lithography

Eun-A Kwak, Mi-Rim Jung, Dai-Gyoung Kim, Ji-Eun Lee, Hye-Keun Oh, Sook Lee

Proceedings Volume 6154, 61542T (2006) https://doi.org/10.1117/12.656204

KEYWORDS: Photomasks, Polarization, Diffraction, Immersion lithography, Finite-difference time-domain method, Binary data, Silicon, Semiconductors, Lithographic illumination, Refractive index

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years