Mr. Di Liang Profile

Di Liang

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Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

Photoresist process simulation to study line edge roughness

Yufei Sha, Shuxin Yao, Miao Jiang, Hao Yang, Di Liang, Cuixiang Wang, Futian Wang, Enqiang Tian, Jiahao Xi, Yulong Jiang, Jiangliu Shi

Proceedings Volume 12953, 1295317 (2024) https://doi.org/10.1117/12.3010734

KEYWORDS: Photoresist materials, Line edge roughness, Quenching, Photoresist developing, Diffusion, Polymers, Acid diffusion length, Photoacid generators, Lithography, Line width roughness

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Proceedings Article | 28 April 2023 Poster + Paper

Frequency doubling and phase error tolerance exploration for chrome-less phase shift mask

Liang Li, Miao Jiang, Di Liang, Binbin Yan, Mingqi Gao, Dajun Wu, Andy Lan, Jiangliu Shi

Proceedings Volume 12494, 1249413 (2023) https://doi.org/10.1117/12.2657844

KEYWORDS: Tolerancing, Semiconducting wafers, Simulations, Reticles, Phase shifts, Etching, Resolution enhancement technologies, Quartz

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Proceedings Article | 27 April 2023 Poster + Paper

Frame generation methodology in mask tape-out flow and automation application

Binbin Yan, Miao Jiang, Futian Wang, Di Liang, Liang Li, Wei Feng, Joer Huang, Dajun Wu, Andy Lan, Jiangliu Shi

Proceedings Volume 12496, 124962K (2023) https://doi.org/10.1117/12.2657841

KEYWORDS: Optical alignment, Overlay metrology, Automation, Metrology

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