Mr. Mingqi Gao Profile

Mingqi Gao

at ChangXin Memory Technologies Inc

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 28 April 2023 Poster + Paper

Frequency doubling and phase error tolerance exploration for chrome-less phase shift mask

Liang Li, Miao Jiang, Di Liang, Binbin Yan, Mingqi Gao, Dajun Wu, Andy Lan, Jiangliu Shi

Proceedings Volume 12494, 1249413 (2023) https://doi.org/10.1117/12.2657844

KEYWORDS: Tolerancing, Semiconducting wafers, Simulations, Reticles, Phase shifts, Etching, Resolution enhancement technologies, Quartz

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Proceedings Article | 26 May 2022 Presentation + Paper

A novel methodology for wafer-level scanner focus spot capture and back-tracing mechanism

Chieh-Chen Chiu, Mingqi Gao, Feng Tian, Wei Feng, Andy Lan, Dan Li, Shengyuan Zhong, Aijiao Zhu, Ningqi Zhu, Yunchen Xu, Jin Zhu, Jincheng Pei, Kevin Huang

Proceedings Volume 12053, 120530U (2022) https://doi.org/10.1117/12.2627284

KEYWORDS: Semiconducting wafers, Contamination, Scanners, Data processing, Statistical analysis, Detection and tracking algorithms, Optical lithography, Lithography, Data analysis

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Proceedings Article | 26 May 2022 Poster + Presentation + Paper

A new development algorithm to optimize scanner alignment sampling for cross-chuck overlay performance optimization

Chieh-Chen Chiu, Feng Tian, Wei Feng, Mingqi Gao, Andy Lan, Chao-Jen Tsou, Shengyuan Zhong, Norman Birnstein, Robin Maximilian Zech, Clemens Utzny, Jin Zhu, Jincheng Pei, Kevin Huang

Proceedings Volume 12053, 1205329 (2022) https://doi.org/10.1117/12.2627283

KEYWORDS: Optical alignment, Optimization (mathematics), Scanners, Semiconducting wafers, Overlay metrology, Data modeling, Performance modeling, Semiconductors

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Proceedings Article | 26 May 2022 Poster + Presentation + Paper

A comprehensive study of scanner alignment mark quantity and layout-dependent effect for overlay performance optimization

Chieh-Chen Chiu, Feng Tian, Wei Feng, Mingqi Gao, Andy Lan, Shengyuan Zhong, Chao-jen Tsou, Ningqi Zhu, Jin Zhu, Jincheng Pei, Kevin Huang

Proceedings Volume 12053, 1205319 (2022) https://doi.org/10.1117/12.2614375

KEYWORDS: Optical alignment, Semiconducting wafers, Scanners, Overlay metrology, Optimization (mathematics), Computer simulations, Performance modeling, Device simulation, Data modeling

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Proceedings Article | 26 May 2022 Poster + Presentation + Paper

Overcome machine to machine overlay for better scanner mix-run control

Chieh-Chen Chiu, Feng Tian, Wei Feng, Mingqi Gao, Andy Lan, Aijiao Zhu, Ningqi Zhu, Dan Li, Jin Zhu, Jincheng Pei, Kevin Huang

Proceedings Volume 12053, 1205318 (2022) https://doi.org/10.1117/12.2614372

KEYWORDS: Scanners, Optical parametric oscillators, Semiconducting wafers, Reticles, Performance modeling, Optical lithography, Switching, Manufacturing, Lithography

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