Dr. Elena Loginova Profile

Dr. Elena Loginova

at Rutgers The State Univ of New Jersey

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 15 April 2008 Paper

Paper

Photons, electrons, and acid yields in EUV photoresists: a progress report

Robert Brainard, Elsayed Hassanein, Juntao Li, Piyush Pathak, Brad Thiel, Franco Cerrina, Richard Moore, Miguel Rodriguez, Boris Yakshinskiy, Elena Loginova, Theodore Madey, Richard Matyi, Matt Malloy, Andrew Rudack, Patrick Naulleau, Andrea Wüest, Kim Dean

Proceedings Volume 6923, 692325 (2008) https://doi.org/10.1117/12.773869

KEYWORDS: Electrons, Photons, Quantum efficiency, Extreme ultraviolet, Polymers, Monte Carlo methods, Extreme ultraviolet lithography, Oscillators, Line width roughness, Electronics

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Proceedings Article | 20 March 2008 Paper

Paper

Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments

S. Hill, N. Faradzhev, C. Tarrio, T. Lucatorto, T. Madey, B. Yakshinskiy, E. Loginova, S. Yulin

Proceedings Volume 6921, 692117 (2008) https://doi.org/10.1117/12.772627

KEYWORDS: Reflectivity, Extreme ultraviolet, Mirrors, Extreme ultraviolet lithography, Carbon, Ruthenium, Reflectometry, Solids, Molecules, Oxidation

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Proceedings Article | 21 March 2007 Paper

Paper

Carbon accumulation and mitigation processes, and secondary electron yields of ruthenium surfaces

B. Yakshinskiy, R. Wasielewski, E. Loginova, Theodore Madey

Proceedings Volume 6517, 65172Z (2007) https://doi.org/10.1117/12.711785

KEYWORDS: Ruthenium, Mirrors, Photons, Extreme ultraviolet lithography, Carbon, Chemistry, Multilayers, Contamination, Extreme ultraviolet, Oxygen

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