Mr. Gao Xu Profile

Gao Xu

at Anchor Semiconductor Inc

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Publications (1)

Proceedings Article | 20 March 2019 Paper

Novel pattern-centric solution for high performance 3D NAND VIA dishing metrology

Sicong Wang, Jian Mi, Abhishek Vikram, Gao Xu, Guojie Cheng, Liming Zhang, Pan Liu

Proceedings Volume 10962, 1096217 (2019) https://doi.org/10.1117/12.2524569

KEYWORDS: Metrology, Semiconducting wafers, Image processing, Metals, 3D metrology, Atomic force microscopy, Chemical mechanical planarization, 3D image processing, Wafer bonding, Data processing

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