Dr. Gideok Kim
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 1249610 (2023) https://doi.org/10.1117/12.2657852
KEYWORDS: Mueller matrices, Line edge roughness, Polarization, Metrology, Simulations, Critical dimension metrology, Holograms, Ellipsometry, Holography

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