Dr. Günter Grabosch Profile

Dr. Günter Grabosch

at SCHOTT

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Publications (3)

Proceedings Article | 21 February 2005 Paper

Analysis of laser durability of CaF2 for optical lithography

Guenter Grabosch, Lutz Parthier, Ute Natura, Karin Poehl, Martin Letz, Christian Muehlig, Konrad Knapp

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.585247

KEYWORDS: Optical lithography, Silver, Lithography, Semiconductors, Semiconductor lasers, Laser applications, Lenses, Immersion lithography, Laser induced damage, Biological research

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Proceedings Article | 28 May 2004 Paper

Strong improvement of critical parameters of CaF2 lens blanks for 193-nm and 157-nm lithography

Guenter Grabosch, Lutz Parthier, Peter Kruell, Konrad Knapp

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536310

KEYWORDS: Annealing, Crystals, Lens blanks, Refractive index, Lithography, Wavefronts, Photovoltaics, 193nm lithography, Birefringence, Quantitative analysis

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Proceedings Article | 26 June 2003 Paper

Critical enabling properties of CaF2 lens blanks for state-of-the-art lithography tools

Joerg Hahn, Guenter Grabosch, Lutz Parthier, Konrad Knapp

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485417

KEYWORDS: Birefringence, Lens blanks, Refractive index, Lithography, Annealing, Crystals, Lens design, Manufacturing, 193nm lithography, Image quality

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