Mr. Hicham Marhfour Profile

Hicham Marhfour

at SCREEN SPE France S.a.r.l.

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Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

EUV lithographic process enablement with novel litho track hardware

Andreia Santos, V. Kosma, J. Vandereyken, H. Marhfour, Y. Tanaka, M. Harumoto, M. Asai, H. Stokes, H. S. Suh, P. Foubert, D. De Simone

Proceedings Volume 11612, 116120M (2021) https://doi.org/10.1117/12.2584515

KEYWORDS: Lithography, Extreme ultraviolet, Photoresist developing, Thin film coatings, Line width roughness, Photoresist materials, Extreme ultraviolet lithography

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