Mr. Ian Lacey Profile

Ian Lacey

Scientific Engineering Associate at Lawrence Berkeley National Lab

Area of Expertise:

precision measurement , atomic spectroscopy , x-ray optics , metrology , data analysis

Publications (34)

Proceedings Article | 12 October 2023 Presentation

Towards a new generation long trace profiler LTP-2020: design, motion control, and performance of a two-carriage gantry system

I. Lacey, K. Anderson, J. Dickert, D. English, B. Nelson, P. Takacs, V. Yashchuk

Proceedings Volume 12695, 1269504 (2023) https://doi.org/10.1117/12.2677786

KEYWORDS: Design and modelling, Control systems, Motion controllers, Sensors, X-ray optics, Optical surfaces, Optical sensors, Mirrors, Ceramics, X-rays

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Proceedings Article | 4 October 2023 Presentation + Paper

Binary pseudo-random array (BPRA) for inspection and calibration for cylindrical wavefront interferometry

K. Munechika, S. Rochester, W. Chao, I. Lacey, C. Pina-Hernandez, Kaito Yamada, M. Biskach, A. Numata, V. Yashchuk

Proceedings Volume 12677, 1267708 (2023) https://doi.org/10.1117/12.2677966

KEYWORDS: Metrology, Calibration, Optical surfaces, Microscopes, X-rays, Fabrication, Wavefronts, Mirror surfaces, Interferometry, Semiconducting wafers

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Proceedings Article | 4 October 2023 Presentation + Paper

Practical considerations in using a binary pseudorandom array for instrument transfer function calibration

P. Takacs, S. Rochester, I. Lacey, K. Munechika, U. Griesmann, V. Yashchuk

Proceedings Volume 12672, 126720K (2023) https://doi.org/10.1117/12.2677154

KEYWORDS: Microscopes, Modulation transfer functions, Aliasing, Cameras, Objectives, Calibration

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Proceedings Article | 3 October 2023 Presentation + Paper

Towards a new generation long trace profiler LTP-2020: optical design of pencil beam interferometry sensor

P. Takacs, Ian Lacey, Valeriy Yashchuk

Proceedings Volume 12695, 1269502 (2023) https://doi.org/10.1117/12.2677418

KEYWORDS: Profilometers, Distortion, Wavefront errors, Reflection, Glasses, Cameras, Surface finishing, Sensors, Antireflective coatings, Design and modelling, Optical surfaces

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Proceedings Article | 3 October 2023 Presentation + Paper

Towards new generation long trace profiler LTP-2020: system design with different sensors in different operation modes

Valeriy Yashchuk, Kevan Anderson, Grant Cutler, Jeff Dickert, Damon English, Ralf Geckeler, Ian Lacey, Peter Takacs

Proceedings Volume 12695, 1269505 (2023) https://doi.org/10.1117/12.2677861

KEYWORDS: Sensors, Mirrors, Metrology, Diffraction gratings, Design and modelling, Autocollimators, X-ray optics, Mirror surfaces, X-rays, Optical surfaces

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Proceedings Article | 4 October 2022 Presentation + Paper

The ALS interferometric microscope upgraded for measurements with large x-ray optics and optical assemblies

Ian Lacey, Kevan Anderson, Harold Barnard, Damon English, Wayne McKinney, Muhammad Saeed, Valeriy Yashchuk

Proceedings Volume 12240, 122400C (2022) https://doi.org/10.1117/12.2633103

KEYWORDS: Microscopes, X-ray optics, Interferometry, Software development, X-rays, Data processing, Mirrors, Sensors, Data acquisition, Metrology

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Proceedings Article | 4 October 2022 Presentation + Paper

Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards

Valeriy Yashchuk, Keiko Munechika, Simon Rochester, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, Peter Takacs

Proceedings Volume 12240, 122400D (2022) https://doi.org/10.1117/12.2633476

KEYWORDS: Microscopes, Calibration, Zoom lenses, Interferometry, Spatial frequencies, Deconvolution, Reflectivity, Metrology, Objectives, Binary data

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Proceedings Article | 4 October 2022 Presentation + Paper

Towards super-resolution interference microscopy metrology of x-ray variable-line-spacing diffraction gratings: recent developments

Simon Rochester, Damon English, Ian Lacey, Keiko Munechika, Valeriy Yashchuk

Proceedings Volume 12240, 122400E (2022) https://doi.org/10.1117/12.2633637

KEYWORDS: Distortion, Microscopes, Metrology, Interferometry, Calibration, X-rays, Diffraction gratings, X-ray microscopy, X-ray diffraction, Super resolution

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Proceedings Article | 3 October 2022 Presentation + Paper

Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics

Keiko Munechika, Weilun Chao, Scott Dhuey, Ian Lacey, Carlos Pina-Hernandez, Simon Rochester, Valeriy Yashchuk

Proceedings Volume 12223, 1222307 (2022) https://doi.org/10.1117/12.2633163

KEYWORDS: Calibration, Metrology, Distortion, Microscopes, X-ray optics, Standards development, X-rays, Mirrors, Interferometry, Spherical lenses

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High-accuracy surface metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate x-ray light with nanometer-scale wavelengths. The current capabilities and possibility for improvements in x˗ray mirror manufacturing are limited by inherent imperfections of the integrated metrology tools. Metrology tools are currently calibrated with super-polished flat test-standard/reference mirrors. This is acceptable for fabrication of slightly curved x-ray optics. However, for even moderately curved aspherical x-ray mirrors the flat-reference calibration is not sufficiently accurate. In the case of micro-stitching interferometry developed for surface measurements with curved xray mirrors, the tool aberration errors are known to be transferred into the optical surface topography of x-ray mirrors. Our approach to improvement of the metrology is to thoroughly calibrate the measuring tool and apply the results of the calibration to gain the reliability of the metrology via calibration-based deconvolution of the measured data. Thus, we explore the application of a recently developed technique for calibrating the instrument’s transfer function (ITF) of 3D optical surface profilers to the metrology with significantly curved x-ray optics. The technique, based on test standards structured as two-dimensional (2D) binary pseudo-random arrays (BPRAs), employs the unique properties of the BPRA patterns in the spatial frequency domain. The inherent 2D power spectral density of the pattern has a deterministic whitenoise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. The high efficacy of the technique has been previously demonstrated in application to metrology with flat and slightly curved optics. Here, we concentrate on development of an efficient fabrication process for production of highly randomized (HR) BPRA test standards on flat and 500-mm spherical optical substrates. We also compare and discuss the results of the ITF calibration of an interferometric microscope when using the HR BPRA standards on flat and curved substrates.

Proceedings Article | 3 October 2022 Presentation + Paper

Characterization of surface texture-measuring optical microscopes using a binary pseudo-random array standard

Ulf Griesmann, Keiko Munechika, T. Brian Renegar, X. Alan Zheng, Johannes Soons, Thomas Germer, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, Peter Takacs, Valeriy Yashchuk

Proceedings Volume 12223, 1222306 (2022) https://doi.org/10.1117/12.2633411

KEYWORDS: Microscopes, Spatial frequencies, Standards development, Confocal microscopy, Interferometry, Optical microscopes

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Proceedings Article | 3 October 2022 Presentation + Paper

Calibration, modeling, parameterization, and verification of the instrument transfer function of an interferometric microscope

P. Takacs, S. Rochester, I. Lacey, K. Munechika, V. Yashchuk

Proceedings Volume 12223, 1222308 (2022) https://doi.org/10.1117/12.2633116

KEYWORDS: Modulation transfer functions, Microscopes, Objectives, Data modeling, Interferometry, Calibration, Spatial frequencies

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Proceedings Article | 5 August 2021 Presentation + Paper

Binary pseudo-random array test standard optimized for characterization of interferometric microscopes

Keiko Munechika, Stefano Cabrini, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, Simon Rochester, Valeriy Yashchuk

Proceedings Volume 11817, 1181704 (2021) https://doi.org/10.1117/12.2594995

KEYWORDS: Microscopes, Calibration, Metrology, Spatial frequencies, Interferometry, Binary data, Deconvolution, Point spread functions, Zoom lenses, X-ray optics

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Proceedings Article | 21 August 2020 Paper

Raytracing the long trace profiler

Peter Takacs, Ian Lacey, Valeriy Yashchuk

Proceedings Volume 11492, 1149204 (2020) https://doi.org/10.1117/12.2569751

KEYWORDS: Distortion, Sensors, Mirrors, Calibration, Lens design, Coating, Wavefronts, Glasses, Optical beam profilers, X-ray optics

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Proceedings Article | 21 August 2020 Paper

Analytical expressions of the surface shape of ‘diaboloid’ mirrors

Valeriy Yashchuk, Ian Lacey, Manuel Sanchez del Rio

Proceedings Volume 11493, 114930N (2020) https://doi.org/10.1117/12.2568332

KEYWORDS: Aspheric optics, Mirrors, Shape analysis, X-rays, Optical simulations, Light sources, X-ray optics, Data modeling, Ray tracing, Grazing incidence

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Proceedings Article | 21 August 2020 Paper

Binary pseudorandom array test standard optimized for characterization of large field-of-view optical interferometers

Valeriy Yashchuk, Sergey Babin, Stefano Cabrini, Weilun Chao, Ulf Griesmann, Ian Lacey, Stefano Marchesini, Keiko Munechika, Carlos Pina-Hernandez, Allen Roginsky

Proceedings Volume 11490, 114900W (2020) https://doi.org/10.1117/12.2568309

KEYWORDS: Modulation transfer functions, Fizeau interferometers, Calibration, Light sources, Interferometers, Spatial frequencies, Metrology, Zoom lenses, Binary data

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Proceedings Article | 21 August 2020 Paper

Multifunctional light beam source for surface slope measuring long trace profilers

Valeriy Yashchuk, Ian Lacey, Kevan Anderson, Jeff Dickert, Brian Smith, Peter Takacs

Proceedings Volume 11492, 1149205 (2020) https://doi.org/10.1117/12.2570462

KEYWORDS: Mirrors, Spatial resolution, Light sources, Light, Point spread functions, Metrology, Diffraction gratings, Optical sensors, X-rays

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Proceedings Article | 21 August 2020 Paper

Characterization of groove density variation of VLS gratings with ALS XROL LTP-II in different operation modes

Ian Lacey, Valeriy Yashchuk

Proceedings Volume 11492, 114920D (2020) https://doi.org/10.1117/12.2568705

KEYWORDS: Diffraction gratings, Diffraction, Error analysis, Data processing, Light sources, Spatial resolution, X-ray diffraction

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Proceedings Article | 2 October 2019 Presentation + Paper

Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors

Ian Lacey, Kevan Anderson, Jeff Dickert, Ralf Geckeler, Andreas Just, Frank Siewert, Brian Smith, Valeriy Yashchuk

Proceedings Volume 11109, 1110905 (2019) https://doi.org/10.1117/12.2529519

KEYWORDS: Calibration, Mirrors, Autocollimators, Error analysis, X-ray optics, Precision calibration, X-rays, Profilometers, Metrology, Sensors

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Proceedings Article | 9 September 2019 Paper

Investigation on lateral resolution of surface slope profilers

Valeriy Yashchuk, Ian Lacey, Thomas Arnold, Hendrik Paetzelt, Simon Rochester, Frank Siewert, Peter Takacs

Proceedings Volume 11109, 111090M (2019) https://doi.org/10.1117/12.2539527

KEYWORDS: Point spread functions, Spatial resolution, Metrology, Sensors, Beam shaping, Calibration, X-ray optics, Mirrors, Spatial frequencies

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Proceedings Article | 18 September 2018 Paper

Ex-situ metrology and data processing techniques developed at the ALS for optimization of beamline performance of bendable x-ray mirrors

Valeriy Yashchuk, Ian Lacey, Wayne McKinney

Proceedings Volume 10761, 1076108 (2018) https://doi.org/10.1117/12.2323218

KEYWORDS: Mirrors, X-rays, Grazing incidence, Metrology, X-ray optics, Optimization (mathematics), Software development, Geometrical optics, Error analysis, Algorithm development

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Proceedings Article | 17 September 2018 Presentation + Paper

The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

Ian Lacey, Kevan Anderson, Gary Centers, Ralf Geckeler, Gevork Gevorkyan, John Grossiord, Andreas Just, Theo Nicolot, Brian Smith, Valeriy Yashchuk

Proceedings Volume 10760, 1076002 (2018) https://doi.org/10.1117/12.2321347

KEYWORDS: Mirrors, Calibration, Metrology, X-ray optics, X-rays, Autocollimators, Gaussian filters, Sensors

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Proceedings Article | 18 August 2018 Paper

Characterization and operation optimization of large aperture optical interferometers using binary pseudorandom array test standards

Valeriy Yashchuk, Sergey Babin, Stefano Cabrini, Ulf Griesmann, Ian Lacey, Keiko Munechika, Carlos Pina-Hernandez, Quandou Wang

Proceedings Volume 10749, 107490R (2018) https://doi.org/10.1117/12.2322011

KEYWORDS: Interferometers, Fizeau interferometers, Spatial frequencies, Modulation transfer functions, Visualization, Monochromatic aberrations

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Proceedings Article | 18 January 2018 Paper

Correlation methods in optical metrology with state-of-the-art x-ray mirrors

Valeriy Yashchuk, Gary Centers, Gevork Gevorkyan, Ian Lacey, Brian Smith

Proceedings Volume 10612, 106120O (2018) https://doi.org/10.1117/12.2305441

KEYWORDS: Mirrors, Metrology, Error analysis, X-ray optics, X-rays, Sensors, Calibration, Switching, Data acquisition, Deflectometry

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The development of fully coherent free electron lasers and diffraction limited storage ring x-ray sources has brought to focus the need for higher performing x-ray optics with unprecedented tolerances for surface slope and height errors and roughness. For example, the proposed beamlines for the future upgraded Advance Light Source, ALS-U, require optical elements characterized by a residual slope error of <100 nrad (root-mean-square) and height error of <1-2 nm (peak-tovalley). These are for optics with a length of up to one meter. However, the current performance of x-ray optical fabrication and metrology generally falls short of these requirements. The major limitation comes from the lack of reliable and efficient surface metrology with required accuracy and with reasonably high measurement rate, suitable for integration into the modern deterministic surface figuring processes. The major problems of current surface metrology relate to the inherent instrumental temporal drifts, systematic errors, and/or an unacceptably high cost, as in the case of interferometry with computer-generated holograms as a reference. In this paper, we discuss the experimental methods and approaches based on correlation analysis to the acquisition and processing of metrology data developed at the ALS X-Ray Optical Laboratory (XROL). Using an example of surface topography measurements of a state-of-the-art x-ray mirror performed at the XROL, we demonstrate the efficiency of combining the developed experimental correlation methods to the advanced optimal scanning strategy (AOSS) technique. This allows a significant improvement in the accuracy and capacity of the measurements via suppression of the instrumental low frequency noise, temporal drift, and systematic error in a single measurement run. Practically speaking, implementation of the AOSS technique leads to an increase of the measurement accuracy, as well as the capacity of ex situ metrology by a factor of about four. The developed method is general and applicable to a broad spectrum of high accuracy measurements.

Proceedings Article | 19 September 2017 Presentation

X-ray optics laboratory at the ALS: current capabilities, new challenges, and tasks for further development (Conference Presentation)

Ian Lacey, Gary Centers, Gevork Gevorkyan, Sergey Nikitin, Brian Smith, Valeriy Yashchuk

Proceedings Volume 10385, 103850D (2017) https://doi.org/10.1117/12.2275565

KEYWORDS: X-ray optics, Metrology, Optical metrology, Interferometry, Microscopy, Calibration, Diffraction, Light sources, Data processing, Optical testing

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Proceedings Article | 7 September 2017 Presentation + Paper

New twist in the optical schematic of surface slope measuring long trace profiler

Sergey Nikitin, Gevork Gevorkyan, Wayne McKinney, Ian Lacey, Peter Takacs, Valeriy Yashchuk

Proceedings Volume 10385, 103850I (2017) https://doi.org/10.1117/12.2274400

KEYWORDS: X-ray optics, Metrology, Interferometry, Prisms, Optical metrology, Free electron lasers, Diffraction, Synchrotrons, Coherent x-ray sources, X-ray sources

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Proceedings Article | 7 September 2017 Presentation + Paper

Surface slope metrology of highly curved x-ray optics with an interferometric microscope

Gevork Gevorkyan, Gary Centers, Kateryna Polonska, Sergey Nikitin, Ian Lacey, Valeriy Yashchuk

Proceedings Volume 10385, 103850H (2017) https://doi.org/10.1117/12.2274220

KEYWORDS: X-ray optics, Interferometry, Metrology, Optical metrology, Calibration, Optics manufacturing, Data analysis, Microscopes

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Proceedings Article | 7 September 2017 Presentation + Paper

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

Ian Lacey, Jérôme Adam, Gary Centers, Gevork Gevorkyan, Sergey Nikitin, Brian Smith, Valeriy Yashchuk

Proceedings Volume 10385, 103850G (2017) https://doi.org/10.1117/12.2273029

KEYWORDS: Metrology, X-ray optics, Mirrors, Nano opto mechanical systems, Calibration, Synchrotron radiation, Light sources, Diffraction, Light, Interferometry

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SPIE Journal Paper | 12 October 2015 Open Access

Advanced environmental control as a key component in the development of ultrahigh accuracy ex situ metrology for x-ray optics

Valeriy Yashchuk, Nikolay Artemiev, Ian Lacey, Wayne McKinney, Howard Padmore

OE, Vol. 54, Issue 10, 104104, (October 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.10.104104

KEYWORDS: Metrology, X-ray optics, Control systems, Mirrors, Humidity, X-rays, Temperature metrology, Interferometry, Calibration, Particles

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Proceedings Article | 1 September 2015 Paper

Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes

Ian Lacey, Erik Anderson, Nikolay Artemiev, Sergey Babin, Stefano Cabrini, Guiseppe Calafiore, Elaine Chan, Wayne McKinney, Christophe Peroz, Peter Takacs, Valeriy Yashchuk

Proceedings Volume 9576, 957608 (2015) https://doi.org/10.1117/12.2185191

KEYWORDS: Modulation transfer functions, Binary data, Calibration, Spatial frequencies, Standards development, Optical microscopes, Silicon, Error analysis, Sensors, Optical fabrication

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Proceedings Article | 17 September 2014 Paper

Angular calibration of surface slope measuring profilers with a bendable mirror

Nikolay Artemiev, Brian Smith, Edward Domning, Ken Chow, Ian Lacey, Valeriy Yashchuk

Proceedings Volume 9206, 92060G (2014) https://doi.org/10.1117/12.2061948

KEYWORDS: Mirrors, Calibration, Laser beam diagnostics, Autocollimators, Metrology, Solids, Optical sensors, Error analysis, X-ray optics, X-rays

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Proceedings Article | 17 September 2014 Paper

The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS

Ian Lacey, Nikolay Artemiev, Edward Domning, Wayne McKinney, Gregory Morrison, Simon Morton, Brian Smith, Valeriy Yashchuk

Proceedings Volume 9206, 920603 (2014) https://doi.org/10.1117/12.2061969

KEYWORDS: Calibration, X-ray optics, Mirrors, Metrology, Autocollimators, Optical testing, Optical spheres, Light sources, Spherical lenses, Precision calibration

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Proceedings Article | 17 September 2014 Paper

A new x-ray optics laboratory (XROL) at the ALS: mission, arrangement, metrology capabilities, performance, and future plans

Valeriy Yashchuk, Nikolay Artemiev, Ian Lacey, Wayne McKinney, Howard Padmore

Proceedings Volume 9206, 92060I (2014) https://doi.org/10.1117/12.2062042

KEYWORDS: Metrology, X-ray optics, Calibration, Mirrors, Humidity, Temperature metrology, Optical testing, Interferometry, Control systems, Particles

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Proceedings Article | 27 September 2013 Paper

Correlation analysis of surface slope metrology measurements of high quality x-ray optics

Valeriy Yashchuk, Nikolay Artemiev, Ian Lacey, Daniel Merthe

Proceedings Volume 8848, 88480I (2013) https://doi.org/10.1117/12.2024694

KEYWORDS: Error analysis, Mirrors, Metrology, Surface finishing, X-ray optics, Polishing, Calibration, Autocollimators, Spatial frequencies, X-rays

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Proceedings Article | 23 September 2013 Paper

High precision surface metrology of x-ray optics with an interferometric microscope

Ian Lacey, Nikolay Artemiev, Wayne McKinney, Daniel Merthe, Valeriy Yashchuk

Proceedings Volume 8838, 883808 (2013) https://doi.org/10.1117/12.2024416

KEYWORDS: Optical aberrations, Zoom lenses, Microscopes, Modulation transfer functions, X-ray optics, Interferometry, Surface finishing, Metrology, Sensors, Optical testing

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Showing 5 of 34 publications

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