CONFERENCE PROCEEDINGS
Advanced Search
Jong Il Choi
at Applied Materials Korea
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 24 May 2004 Paper
Electrical defect SEM review under the various electric circumstances on SAC layer
Tae Yong Lee, Nam-Koong Whan, Byoung Ho Lee, Soo-Bok Chin, Do Hyun Cho, Jong Il Choi, Seo Shik Hur, Ki Hwa Ko, Jeong-Ho Yeo
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534494
KEYWORDS: Inspection, Scanning electron microscopy, Semiconducting wafers, Image quality, Semiconductors, Defect inspection, Image resolution, Holmium, Defect detection, Optical inspection
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top