Mr. Jun Yao Profile

Jun Yao

at Yangtze Memory Technologies Co Ltd

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Publications (1)

Proceedings Article | 23 March 2020 Paper

Model based CAOPC flow for memory chips to improve performance and consistency of RET solutions

Srividya Jayaram, Sherif Hany Mousa, Ashutosh Rathi, Pat LaCour, Zhenguo Zheng, Lei Zhang, Yaobin Feng, Jun Yao

Proceedings Volume 11327, 1132709 (2020) https://doi.org/10.1117/12.2551829

KEYWORDS: Optical proximity correction, SRAF, Resolution enhancement technologies, Lithography, Model-based design, Manufacturing, Pattern recognition

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