CONFERENCE PROCEEDINGS
Advanced Search
Junho Kim
at KLA Corp
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 10 April 2024 Poster + Paper
SCOL long wavelength measurements on DRAM thick layers
Honggoo Lee, Jieun Lee, Dongyong Lee, Seungmo Hong, Jaewook Seo, Minho Jeong, Hongpeng Su, Almog Aviv, Junho Kim, Nanglyeom Oh, Dongsub Choi, Tal Yaziv, Liu Liu, Richard Wang, Ohad Bachar, Renan Milo, Roie Volkovich
Proceedings Volume 12955, 129552K (2024) https://doi.org/10.1117/12.3010159
KEYWORDS: Overlay metrology, Metrology, Diffraction gratings, Diffraction, Simulations, Opacity, Semiconducting wafers, Optical parametric oscillators, Scatterometry, Measurement uncertainty
Proceedings Article | 27 April 2023 Poster + Paper
Residuals reduction in imaging-based overlay using color per layer
Shlomit Katz, Suk Won Park, Joonsang You, Hyunjun Kim, Honggoo Lee, Jungchan Kim, Dongyoung Lee, Hongbok Yeon, Joonseuk Lee, Sang-Ho Lee, Jae Wook Seo, Dor Yehuda, Junho Kim, Hongcheon Yang, Dohwa Lee, Nanglyeom Oh, Dongsub Choi, Wayne Zhou, Hedvi Spielberg, Ohad Bachar
Proceedings Volume 12496, 1249626 (2023) https://doi.org/10.1117/12.2655681
KEYWORDS: Metrology, Overlay metrology, High volume manufacturing, Optical parametric oscillators, Optical gratings, Visualization
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top