CONFERENCE PROCEEDINGS
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Hong Bok Yeon
at SK Hynix Inc
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Publications (3)
Proceedings Article | 27 April 2023 Poster + Paper
Residuals reduction in imaging-based overlay using color per layer
Shlomit Katz, Suk Won Park, Joonsang You, Hyunjun Kim, Honggoo Lee, Jungchan Kim, Dongyoung Lee, Hongbok Yeon, Joonseuk Lee, Sang-Ho Lee, Jae Wook Seo, Dor Yehuda, Junho Kim, Hongcheon Yang, Dohwa Lee, Nanglyeom Oh, Dongsub Choi, Wayne Zhou, Hedvi Spielberg, Ohad Bachar
Proceedings Volume 12496, 1249626 (2023) https://doi.org/10.1117/12.2655681
KEYWORDS: Metrology, Overlay metrology, High volume manufacturing, Optical parametric oscillators, Optical gratings, Visualization
Proceedings Article | 26 May 2022 Presentation + Paper
Overlay stability control in IBO measurement using rAIM target
Proceedings Volume 12053, 120530E (2022) https://doi.org/10.1117/12.2608053
KEYWORDS: Overlay metrology, Process control, Optical lithography, Metrology, Inspection, Semiconducting wafers, Data modeling, Wafer-level optics, Optical properties, Optical design
Proceedings Article | 22 February 2021 Presentation + Paper
Qualification of small alignment mark by on-product overlay performance
Proceedings Volume 11613, 116130J (2021) https://doi.org/10.1117/12.2584618
KEYWORDS: Optical alignment, Semiconducting wafers, Overlay metrology, Algorithm development, Semiconductor manufacturing, Scanners, Process control, Device simulation
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