Dr. Kathleen M. Hoogeboom-Pot Profile

Dr. Kathleen M. Hoogeboom-Pot

at Intel Corp.

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Author

Publications (4)

Proceedings Article | 21 April 2016 Paper

Reliable characterization of materials and nanostructured systems <<50nm using coherent EUV beams

Jorge Hernandez-Charpak, Travis Frazer, Joshua Knobloch, Kathleen Hoogeboom-Pot, Damiano Nardi, Weilun Chao, Lei Jiang, Marie Tripp, Sean King, Henry Kapteyn, Margaret Murnane

Proceedings Volume 9778, 97780I (2016) https://doi.org/10.1117/12.2219434

KEYWORDS: Nanowires, Extreme ultraviolet, Thin films, Metrology, Nanostructuring, Nanostructures, Photoacoustic spectroscopy, Acoustics, Nanostructured thin films, Physics, Laser optics, Phonons, Dielectrics, Thermal effects, Thermal modeling

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Proceedings Article | 19 March 2015 Paper

Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams

Kathleen Hoogeboom-Pot, Jorge Hernandez-Charpak, Travis Frazer, Xiaokun Gu, Emrah Turgut, Erik Anderson, Weilun Chao, Justin Shaw, Ronggui Yang, Margaret Murnane, Henry Kapteyn, Damiano Nardi

Proceedings Volume 9424, 942417 (2015) https://doi.org/10.1117/12.2085615

KEYWORDS: Phonons, Extreme ultraviolet, Acoustics, Nanostructures, Tantalum, Nanostructuring, Nickel, Diffraction, Thermal effects, Nanowires

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Proceedings Article | 10 April 2013 Paper

Probing limits of acoustic nanometrology using coherent extreme ultraviolet light

Damiano Nardi, Kathleen Hoogeboom-Pot, Jorge Hernandez-Charpak, Marie Tripp, Sean King, Erik Anderson, Margaret Murnane, Henry Kapteyn

Proceedings Volume 8681, 86810N (2013) https://doi.org/10.1117/12.2011194

KEYWORDS: Acoustics, Thin films, Extreme ultraviolet, Nanostructures, Transducers, Nanostructuring, Picosecond phenomena, Silicon films, Interfaces, Silicon

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Proceedings Article | 3 April 2012 Paper

Characterization of ultrathin films by laser-induced sub-picosecond photoacoustics with coherent extreme ultraviolet detection

Qing Li, Kathleen Hoogeboom-Pot, Damiano Nardi, Chris Deeb, Sean King, Marie Tripp, Erik Anderson, Margaret Murnane, Henry Kapteyn

Proceedings Volume 8324, 83241P (2012) https://doi.org/10.1117/12.916866

KEYWORDS: Thin films, Acoustics, Photoacoustic spectroscopy, Extreme ultraviolet, Nanostructures, Nickel, Wave propagation, Silicon films, Silicon, Velocity measurements

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