CONFERENCE PROCEEDINGS
Advanced Search
Ken Kuo
at EDA-G
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 12 November 2024 Presentation + Paper
CATS SmartFracture: a new fracture engine for curvilinear and multigon mask data input
Kokoro Kato, Satoshi Mitsuno, Kuninori Nishizawa, Ken Kuo, Johnny Yeap, J. Jou
Proceedings Volume 13216, 132161L (2024) https://doi.org/10.1117/12.3034562
KEYWORDS: Computed tomography, Optical proximity correction, Semiconductor manufacturing, Mathematical optimization, Manufacturing, Data processing, Standards development, Semiconductors, Semiconducting wafers, Photomasks
Proceedings Article | 8 November 2012 Paper
Generating well-behaved OASIS files for mask data processing
D. Hung, J. Canepa, K. Kuo, J. Jou
Proceedings Volume 8522, 85220V (2012) https://doi.org/10.1117/12.964293
KEYWORDS: Photomasks, Data processing, Data conversion, Semiconductor manufacturing, Manufacturing, Data storage, Associative arrays, Product engineering, Data modeling, Lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top