Mr. Kento Mizui Profile

Kento Mizui

at Toyama Prefectural Univ

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Publications (2)

Proceedings Article | 26 March 2019 Paper

Gas permeable mold for defect reduction in nanoimprint lithography

Kento Mizui, Makoto Hanabata, Satoshi Takei

Proceedings Volume 10958, 1095818 (2019) https://doi.org/10.1117/12.2514790

KEYWORDS: Ultraviolet radiation, Nanoimprint lithography, Quartz, Liquids, Applied physics, Coating, Industrial chemicals, Glasses, Silicon, Semiconducting wafers

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Proceedings Article | 19 March 2018 Paper

Gas permeable template derived from cellulose in ultraviolet nanoimprint

Shinya Nakajima, Kento Mizui, Makoto Hanabata, Satoshi Takei

Proceedings Volume 10584, 1058416 (2018) https://doi.org/10.1117/12.2297093

KEYWORDS: Ultraviolet radiation, Nanoimprint lithography, Transmittance, Manufacturing

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