Mr. Kwan-Hyung Kim Profile

Kwan-Hyung Kim

at Seoul National Univ

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Publications (1)

Proceedings Article | 25 March 2008 Paper

22 nm node contact hole formation in extreme ultra-violet lithography

Eun-Jin Kim, Kwan-Hyung Kim, Hyeong-Ryeol Park, Jun-Yeob Yeo, Jai-Soon Kim, Hye-Keun Oh

Proceedings Volume 6922, 69223X (2008) https://doi.org/10.1117/12.780242

KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Photomasks, Lithography, Ultraviolet radiation, Image processing, Extreme ultraviolet, Refractive index, Silicon, Critical dimension metrology

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