Dr. Kyeong Dong Park Profile

Dr. Kyeong Dong Park

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 2 April 2014 Paper

Focus control budget analysis for critical layers of flash devices

Jong Hoon Jang, Tony Park, Kyeong Dong Park, Jong Hyun Hwang, Jin Phil Choi, Young Seog Kang

Proceedings Volume 9050, 90502F (2014) https://doi.org/10.1117/12.2046235

KEYWORDS: Semiconducting wafers, Scanners, Finite element methods, Monochromatic aberrations, Control systems, Error analysis, Code division multiplexing, Critical dimension metrology, Process control, Sensors

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Proceedings Article | 2 April 2014 Paper

Improvement of inter-field CDU by using on-product focus control

Kyeong Dong Park, Tony Park, Jong Hyun Hwang, Jin Phil Choi, Young Seog Kang

Proceedings Volume 9050, 90500R (2014) https://doi.org/10.1117/12.2046224

KEYWORDS: Semiconducting wafers, Metrology, Reticles, Signal processing, Control systems, Lithography, Scanners, Process control, Scanning electron microscopy, Computer simulations

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