Ms. Li Yan Siow Profile

Li Yan Siow

at A*STAR Institute of Microelectronics

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Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper

CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN

Doris K. Ng, Chong-Pei Ho, Tantan Zhang, Linfang Xu, Li-Yan Siow, Wing-Wai Chung, Hong Cai, Lennon Y. Lee, Qingxin Zhang, Navab Singh

Proceedings Volume 11697, 116970N (2021) https://doi.org/10.1117/12.2582707

KEYWORDS: Infrared sensors, Infrared radiation, Absorption, Thin films, Sensors, Pyroelectric detectors, Infrared detectors, Aluminum nitride, Microelectromechanical systems, Thermography

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