Ms. Linfang Xu Profile

Linfang Xu

at A*STAR Institute of Microelectronics

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Author

Publications (8)

Proceedings Article | 12 March 2024 Presentation + Paper

SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors

Doris K. Ng, Weiguo Chen, Linfang Xu, Harmony J. Lau, Landobasa Y. Tobing, Chong Pei Ho, Wing Wai Chung, Norhanani Jaafar, Hanfeng Fu, Qingxin Zhang

Proceedings Volume 12899, 128990J (2024) https://doi.org/10.1117/12.3002138

KEYWORDS: Pyroelectric detectors, Gas sensors, Sensors, Aluminum nitride, Signal detection, Pyroelectricity, Gases, Mid infrared, CMOS sensors

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Proceedings Article | 11 March 2024 Presentation + Paper

Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society

Doris K. Ng, Weiguo Chen, Huanhuan Wang, Zhonghua Gu, Md Hazwani Khairy Md Husni, Isabel Judith Wee Yi Koh, Linfang Xu, Kristel Pei Xuan Wee, Chong Pei Ho, Jia Sheng Goh, Qingxin Zhang

Proceedings Volume 12885, 128850Z (2024) https://doi.org/10.1117/12.3021874

KEYWORDS: Pyroelectric detectors, Signal detection, Sensors, Gas sensors, Sustainability, Thermal sensing, Hydrogen, Gases, CMOS sensors

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Proceedings Article | 15 March 2023 Presentation + Paper

Low-power contactless button system based on MEMS ScAlN pyroelectric detector

Linfang Xu, Doris K. Ng, Weiguo Chen, Nanxi Li, Chong Pei Ho, Duan Jian Goh, Yao Zhang, Qingxin Zhang, Lennon Y. Lee

Proceedings Volume 12434, 1243405 (2023) https://doi.org/10.1117/12.2648806

KEYWORDS: Pyroelectricity, Pyroelectric detectors, Signal detection, Power consumption, Thermography, Microelectromechanical systems, Infrared imaging, Infrared sensors, Infrared detectors

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Proceedings Article | 15 March 2023 Poster + Paper

An integrated MEMS thermal emitter with piezoelectric actuation

Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, Lennon Yao Ting Lee

Proceedings Volume 12434, 124340T (2023) https://doi.org/10.1117/12.2649536

KEYWORDS: Microelectromechanical systems, Silicon, Fabrication, Aluminum nitride, Molybdenum, Emission spectrum, Silicon nitride, Emission wavelengths, Electrodes, Biological and chemical sensing

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Proceedings Article | 13 March 2023 Presentation + Paper

On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector

Hong Cai, Md Hazwani Khairy, Rachel Chen Fang Ang, Linfang Xu, Doris Keh Ting Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee

Proceedings Volume 12426, 124260H (2023) https://doi.org/10.1117/12.2650363

KEYWORDS: Sensors, Pyroelectric detectors, Microelectromechanical systems, Gas sensors, Carbon dioxide, Pyroelectricity, CMOS sensors, Temperature metrology, Environmental monitoring

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Proceedings Article | 5 March 2021 Presentation + Paper

Photonic crystal MEMS emitter for chemical gas sensing

Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Lee

Proceedings Volume 11697, 116970M (2021) https://doi.org/10.1117/12.2581358

KEYWORDS: Photonic crystals, Industrial chemicals, Biological and chemical sensing, Microelectromechanical systems, Mid-IR, Thermal sensing, Silicon, Sensing systems, Optical sensors, Process control

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Proceedings Article | 5 March 2021 Presentation + Paper

CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN

Doris K. Ng, Chong-Pei Ho, Tantan Zhang, Linfang Xu, Li-Yan Siow, Wing-Wai Chung, Hong Cai, Lennon Y. Lee, Qingxin Zhang, Navab Singh

Proceedings Volume 11697, 116970N (2021) https://doi.org/10.1117/12.2582707

KEYWORDS: Infrared sensors, Infrared radiation, Absorption, Thin films, Sensors, Pyroelectric detectors, Infrared detectors, Aluminum nitride, Microelectromechanical systems, Thermography

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Proceedings Article | 5 March 2021 Presentation + Paper

Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides

Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li, Jinjing Fu, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yuxi Cui, Fuu Ming Kai, Lennon Yao Ting Lee

Proceedings Volume 11689, 116890C (2021) https://doi.org/10.1117/12.2581814

KEYWORDS: Gas sensors, Silicon, Hollow waveguides, Semiconducting wafers, Sensors, Infrared technology, Deep reactive ion etching, Carbon dioxide, Wet etching, Waveguides

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Showing 5 of 8 publications

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