Mr. Masatoshi Terayama Profile

Masatoshi Terayama

at Toshiba Corp

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Author

Publications (3)

Proceedings Article | 30 June 2012 Paper

New development system for EUV mask

Masatoshi Terayama, Hideaki Sakurai, Mari Sakai, Masamitsu Itoh, Hideo Funakoshi, Hideaki Iwasaka, Junko Iizuka, Mitsuaki Maruyama, Naoya Hayashi

Proceedings Volume 8441, 844105 (2012) https://doi.org/10.1117/12.979645

KEYWORDS: Extreme ultraviolet, Photomasks, Particles, Extreme ultraviolet lithography, Deep ultraviolet, Scanners, Non-optical lithography, Lithography, Manufacturing, Error analysis

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Proceedings Article | 11 May 2009 Paper

Study of electric-field-induced-development method

Masatoshi Terayama, Hideaki Sakurai, Mari Sakai, Masamitsu Ito, Osamu Ikenaga, Hideo Funakoshi, Takahiro Shiozawa, Syoutarou Miyazaki, Yoshihiko Saito, Naoya Hayashi

Proceedings Volume 7379, 73791X (2009) https://doi.org/10.1117/12.824310

KEYWORDS: Ions, Line edge roughness, Line width roughness, Critical dimension metrology, Spatial frequencies, Photomasks, Photoresist processing, Halftones, Scanning electron microscopy, Fourier transforms

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Proceedings Article | 17 October 2008 Paper

Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication

Hideaki Sakurai, Masatoshi Terayama, Mari Sakai, Masamitsu Itoh, Osamu Ikenaga, Hideo Funakoshi, Norifumi Sato, Kenji Nakamizo, Masato Nomura, Yoshihiko Saito, Junji Nakao, Naoya Hayashi

Proceedings Volume 7122, 71220D (2008) https://doi.org/10.1117/12.801424

KEYWORDS: Particles, Mask making, Metals, Polonium, Liquids, Control systems, Sensors, Error analysis, Atomic force microscopy, Temperature sensors

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