Mr. Michael Friedrich Profile

Michael Friedrich

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Publications (2)

Proceedings Article | 5 October 2023 Paper

Fabrication of gate electrodes for scalable quantum computing using CMOS industry compatible e-beam lithography and numerical simulation of the resulting quantum device

Varvara Brackmann, Malte Neul, Michael Friedrich, Wolfram Langheinrich, Maik Simon, Pascal Muster, Sebastian Pregl, Arne Demmler, Norbert Hanisch, Maximilian Lederer, Katrin Zimmermann, Jan Klos, Felix Reichmann, Yuji Yamamoto, Marcus Wislicenus, Claus Dahl, Lars Schreiber, Hendrik Bluhm, Benjamin Lilienthal-Uhlig

Proceedings Volume 12802, 128020F (2023) https://doi.org/10.1117/12.2675943

KEYWORDS: Quantum spin, Quantum gates, Electrodes, Quantum communications, Electron beam lithography, Etching, Quantum processes, Fabrication, Semiconducting wafers, Silicon

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Proceedings Article | 29 August 2019 Paper

Influence of the dose assignment and fracturing type on patterns exposed by a variable shaped e-beam writer: simulation vs experiment

Varvara Brackmann, Michael Friedrich, Clyde Browning, Norbert Hanisch, Benjamin Uhlig

Proceedings Volume 11177, 1117713 (2019) https://doi.org/10.1117/12.2534642

KEYWORDS: Point spread functions, Scattering, Scanning electron microscopy, Tolerancing, Critical dimension metrology, Calibration, Electron beam lithography, Electron beams

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