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Min Choo
at KLA Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 22 November 2023 Presentation
Multi-column e-beam inspection system for advanced EUV reticles
Kunal Rohilla, David Aupperle, Wenxing Jiang, Seungtak Seo, Sanguk Park, Jongju Park, Jin Choi, Sanghee Lee, Min Choo, Yeonjeong Choi, Paul Chung
Proceedings Volume PC12750, PC127500E (2023) https://doi.org/10.1117/12.3007916
KEYWORDS: Inspection, Reticles, Extreme ultraviolet, Quality control, Manufacturing, Laser systems engineering, Laser manufacturing, Industry, Extreme ultraviolet lithography, Design and modelling
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