Dr. Olga A. Ezhova Profile

Dr. Olga A. Ezhova

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Publications (2)

Proceedings Article | 15 March 2019 Paper

Research of the microelectromechanical switch with diﬀerent materials of metal membrane

Igor Lysenko, Alexey Tkachenko, Olga Ezhova

Proceedings Volume 11022, 110220Q (2019) https://doi.org/10.1117/12.2521420

KEYWORDS: Switches, Microelectromechanical systems, Gold, Aluminum, Reliability

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Proceedings Article | 30 December 2016 Paper

Research of the micromechanical three-axis accelerometer

B. Konoplev, I. Lysenko, E. Ryndin, O. Ezhova, F. Bondarev

Proceedings Volume 10224, 102241B (2016) https://doi.org/10.1117/12.2266766

KEYWORDS: Microelectromechanical systems, Prototyping, Sensors, Electronics, Nanotechnology, Finite element methods, Manufacturing, Modal analysis, Microsystems, Transducers

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