Mr. Peng Zheng Yao Profile

Peng Zheng Yao

at Institute of Optics and Electronics CAS

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Publications (3)

Proceedings Article | 18 September 2014 Paper

The impact of polarization on grating performance of the lateral shearing interferometer

Zhengpeng Yao, Xuefeng Liu, Tingwen Xing

Proceedings Volume 9282, 92822J (2014) https://doi.org/10.1117/12.2068814

KEYWORDS: Diffraction gratings, Polarization, Diffraction, Shearing interferometers, Finite-difference time-domain method, Phase shifts, Magnetism, Interferometers, Neptunium, Electromagnetism

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Proceedings Article | 23 August 2013 Paper

Vector analysis of two-dimensional Ronchi grating in the metrology system

Zhengpeng Yao, Tingwen Xing

Proceedings Volume 8911, 89110J (2013) https://doi.org/10.1117/12.2034499

KEYWORDS: Diffraction gratings, Diffraction, Wavefronts, Ronchi rulings, Shearing interferometers, Dielectric polarization, Metrology, Lithography, Sensors, Dielectrics

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Proceedings Article | 13 May 2013 Paper

The impact of polarization on metrology performance of the lateral shearing interferometer

Zhengpeng Yao, Tingwen Xing

Proceedings Volume 8788, 87882F (2013) https://doi.org/10.1117/12.2020253

KEYWORDS: Polarization, Wavefronts, Metrology, Shearing interferometers, Lithography, Diffraction gratings, Diffraction, Sensors, Wavefront aberrations, Interferometers

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