Pengfei Xu
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2023 Presentation + Paper
F. Ferraro, P. De Heyn, M. Kim, N. Rajasekaran, M. Berciano, G. Muliuk, D. Bode, G. Lepage, S. Janssen, R. Magdziak, J. De Coster, H. Kobbi, S. Lardenois, N. Golshani, L. Shiramin, C. Marchese, S. Rajmohan, S. Nadarajan, N. Singh, S. Radhakrishnan, A. Tsiara, P. Xu, A. Karagoz, D. Yudistira, M. Martire, A. Shahar, M. Chakrabarti, D. Velenis, W. Guo, A. Miller, Kristof Croes, S. Balakrishnan, P. Verheyen, Y. Ban, J. Van Campenhout, P. Absil
Proceedings Volume 12429, 1242909 (2023) https://doi.org/10.1117/12.2650579
KEYWORDS: Silicon nitride, Silicon, Low pressure chemical vapor deposition, Waveguides, Silicon photonics, Semiconducting wafers, Tunable filters, Plasma enhanced chemical vapor deposition, Integrated optics, Germanium

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